JPS6447856A - Manufacture of thin metallic film - Google Patents

Manufacture of thin metallic film

Info

Publication number
JPS6447856A
JPS6447856A JP20364687A JP20364687A JPS6447856A JP S6447856 A JPS6447856 A JP S6447856A JP 20364687 A JP20364687 A JP 20364687A JP 20364687 A JP20364687 A JP 20364687A JP S6447856 A JPS6447856 A JP S6447856A
Authority
JP
Japan
Prior art keywords
substrate
cylindrical
peripheral surface
high polymer
electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20364687A
Other languages
English (en)
Inventor
Kiyokazu Toma
Ryuji Sugita
Kazuyoshi Honda
Taro Nanbu
Shigeo Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP20364687A priority Critical patent/JPS6447856A/ja
Publication of JPS6447856A publication Critical patent/JPS6447856A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP20364687A 1987-08-17 1987-08-17 Manufacture of thin metallic film Pending JPS6447856A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20364687A JPS6447856A (en) 1987-08-17 1987-08-17 Manufacture of thin metallic film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20364687A JPS6447856A (en) 1987-08-17 1987-08-17 Manufacture of thin metallic film

Publications (1)

Publication Number Publication Date
JPS6447856A true JPS6447856A (en) 1989-02-22

Family

ID=16477490

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20364687A Pending JPS6447856A (en) 1987-08-17 1987-08-17 Manufacture of thin metallic film

Country Status (1)

Country Link
JP (1) JPS6447856A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012034587A1 (en) * 2010-09-14 2012-03-22 Applied Materials, Inc. A system and a method for processing a flexible substrate
WO2015037534A1 (ja) * 2013-09-10 2015-03-19 コニカミノルタ株式会社 機能性フィルムの製造装置及び製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012034587A1 (en) * 2010-09-14 2012-03-22 Applied Materials, Inc. A system and a method for processing a flexible substrate
WO2015037534A1 (ja) * 2013-09-10 2015-03-19 コニカミノルタ株式会社 機能性フィルムの製造装置及び製造方法

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