JPS6447022A - Reaction tube for heat treatment - Google Patents

Reaction tube for heat treatment

Info

Publication number
JPS6447022A
JPS6447022A JP20354687A JP20354687A JPS6447022A JP S6447022 A JPS6447022 A JP S6447022A JP 20354687 A JP20354687 A JP 20354687A JP 20354687 A JP20354687 A JP 20354687A JP S6447022 A JPS6447022 A JP S6447022A
Authority
JP
Japan
Prior art keywords
quartz glass
tube
reinforcement member
reaction tube
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20354687A
Other languages
Japanese (ja)
Other versions
JP2617726B2 (en
Inventor
Hideyasu Matsuo
Koichi Endo
Yasumi Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP62203546A priority Critical patent/JP2617726B2/en
Publication of JPS6447022A publication Critical patent/JPS6447022A/en
Application granted granted Critical
Publication of JP2617726B2 publication Critical patent/JP2617726B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/02—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor
    • C03B37/025—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor from reheated softened tubes, rods, fibres or filaments, e.g. drawing fibres from preforms
    • C03B37/026—Drawing fibres reinforced with a metal wire or with other non-glass material
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/04—Re-forming tubes or rods
    • C03B23/047—Re-forming tubes or rods by drawing
    • C03B23/0476—Re-forming tubes or rods by drawing onto a forming die, e.g. a mandrel or a wire
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/20—Uniting glass pieces by fusing without substantial reshaping
    • C03B23/207—Uniting glass rods, glass tubes, or hollow glassware

Abstract

PURPOSE:To manufacture the title reaction tube for heat treatment without any excessive bonding due to the thermal deformation regardless of long time operation at high temperature by a method wherein a linear reinforcement member coated with quartz glass is wound in a spiral around the outer surface of a reaction tube body made of quartz glass. CONSTITUTION:Linear Mo or W made reinforcement member 2 is drawn out in the arrow X direction inside a quartz glass made tube 1 (while specifying the space inside the tube 1 to be in vacuum atmosphere or reducing atmosphere such as H2, H2+N2 etc.) at this time, the tube 1 is heated by a heater such as a burner 4 etc., to be softened so that the wall thickness of the tube 1 may be varied to coat the reinforcement member 2 with a quartz glass 3 of 3mm in final thickness. The diameter of the reinforcement member 2 of 0.3mm in thickness is not substantially changed. The reinforcement member coated with the quartz glass tube 3 of 3mm in thickness is to be roughly or closely wound in spiral around the outer surface of quartz glass made reaction tube main body 5. At this time, if the reinforcement member 2 is arranged near the quartz glass tube 3 softened by a heater, the quartz glass will be mutually welded together.
JP62203546A 1987-08-18 1987-08-18 Reaction tube for heat treatment Expired - Lifetime JP2617726B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62203546A JP2617726B2 (en) 1987-08-18 1987-08-18 Reaction tube for heat treatment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62203546A JP2617726B2 (en) 1987-08-18 1987-08-18 Reaction tube for heat treatment

Publications (2)

Publication Number Publication Date
JPS6447022A true JPS6447022A (en) 1989-02-21
JP2617726B2 JP2617726B2 (en) 1997-06-04

Family

ID=16475931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62203546A Expired - Lifetime JP2617726B2 (en) 1987-08-18 1987-08-18 Reaction tube for heat treatment

Country Status (1)

Country Link
JP (1) JP2617726B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03187937A (en) * 1989-12-18 1991-08-15 Nippon Telegr & Teleph Corp <Ntt> Miniature electric furnace for processing optical fiber

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54100559U (en) * 1977-12-26 1979-07-16
JPS62101025A (en) * 1985-10-28 1987-05-11 Toshiba Corp Jig for manufacturing semiconductor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54100559U (en) * 1977-12-26 1979-07-16
JPS62101025A (en) * 1985-10-28 1987-05-11 Toshiba Corp Jig for manufacturing semiconductor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03187937A (en) * 1989-12-18 1991-08-15 Nippon Telegr & Teleph Corp <Ntt> Miniature electric furnace for processing optical fiber

Also Published As

Publication number Publication date
JP2617726B2 (en) 1997-06-04

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