JPS6446919A - Sealing mechanism of heat-resistant tube for heating wafer - Google Patents
Sealing mechanism of heat-resistant tube for heating waferInfo
- Publication number
- JPS6446919A JPS6446919A JP20370687A JP20370687A JPS6446919A JP S6446919 A JPS6446919 A JP S6446919A JP 20370687 A JP20370687 A JP 20370687A JP 20370687 A JP20370687 A JP 20370687A JP S6446919 A JPS6446919 A JP S6446919A
- Authority
- JP
- Japan
- Prior art keywords
- cover body
- discharge port
- heat
- airtightness
- resistant tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To ensure the airtightness of a heat-resistant tube and a cover body using a simple structure while automating the cover body by introducing a gas remaining among a fitting work surface in a ring-shaped member and a reaction tube, the cover body, etc., without being discharged through an exclusive discharge port to the outside through a specified discharge port from an annular groove. CONSTITUTION:Gases respectively remaining among a fitting working surface in a ring-shaped member 22 and a fitting working surface in a tapered section 21a in a reaction tube 21 and a cover body 26 without being discharged to the outside through a third discharge port 29 can be introduced to the outside through a first discharge port 25 communicated with a first groove 23 and a second discharge port 28 communicated with a second groove 27. Consequently, airtightness on the fitting work surfaces can be held sufficiently. A discharge port for exhausting the gas as seen in conventional devices is not connected to the cover body 26, thus automatically opening and closing the cover body 26 easily. Accordingly, the airtightness of a heat-resistant tube and the cover body can be ensured by simple structure while easily automating the cover body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20370687A JPS6446919A (en) | 1987-08-17 | 1987-08-17 | Sealing mechanism of heat-resistant tube for heating wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20370687A JPS6446919A (en) | 1987-08-17 | 1987-08-17 | Sealing mechanism of heat-resistant tube for heating wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6446919A true JPS6446919A (en) | 1989-02-21 |
Family
ID=16478505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20370687A Pending JPS6446919A (en) | 1987-08-17 | 1987-08-17 | Sealing mechanism of heat-resistant tube for heating wafer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6446919A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06326047A (en) * | 1994-05-30 | 1994-11-25 | Kokusai Electric Co Ltd | Joining section structure of reactant gas feed pipe and reaction pipe of diffusion equipment |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6271220A (en) * | 1985-09-25 | 1987-04-01 | Toshiba Corp | Sealing method for semiconductor diffusing apparatus |
| JPS6431411A (en) * | 1987-07-28 | 1989-02-01 | Toshiba Corp | Device for closing tube opening of heat treatment furnace |
-
1987
- 1987-08-17 JP JP20370687A patent/JPS6446919A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6271220A (en) * | 1985-09-25 | 1987-04-01 | Toshiba Corp | Sealing method for semiconductor diffusing apparatus |
| JPS6431411A (en) * | 1987-07-28 | 1989-02-01 | Toshiba Corp | Device for closing tube opening of heat treatment furnace |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06326047A (en) * | 1994-05-30 | 1994-11-25 | Kokusai Electric Co Ltd | Joining section structure of reactant gas feed pipe and reaction pipe of diffusion equipment |
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