JPS6446041A - Spring system for supporting displaceable member - Google Patents

Spring system for supporting displaceable member

Info

Publication number
JPS6446041A
JPS6446041A JP18857188A JP18857188A JPS6446041A JP S6446041 A JPS6446041 A JP S6446041A JP 18857188 A JP18857188 A JP 18857188A JP 18857188 A JP18857188 A JP 18857188A JP S6446041 A JPS6446041 A JP S6446041A
Authority
JP
Japan
Prior art keywords
displacement amount
force
spring
plate springs
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18857188A
Other languages
Japanese (ja)
Inventor
Sutsuengaa Furantsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Carl Zeiss AG
Original Assignee
Carl Zeiss SMT GmbH
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH, Carl Zeiss AG filed Critical Carl Zeiss SMT GmbH
Publication of JPS6446041A publication Critical patent/JPS6446041A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/002—Details
    • G01B3/008—Arrangements for controlling the measuring force
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
    • F16F15/073—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs using only leaf springs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G01B5/012—Contact-making feeler heads therefor

Abstract

PURPOSE: To maintain the non-linear distance-force characteristic curve from the threshold value of the displacement amount by supporting the displaceable part between two plate springs and bending one plate spring perpendicularly in the longitudinal direction to form a cylindrical shell. CONSTITUTION: A spring system consists of plate springs 2, 3 holding rollers 4, 5 having ball bearings at their free ends. A part 1 is supported between the rollers 4, 5 in a play-free, friction-free manner. The plate springs 2, 3 are bent perpendicularly in the longitudinal direction to form cylindrical shells to regulate the proportional range of the spring force to the displacement amount by their material, thickness and bending rate. When the part 1 is applied by a force in the direction of an arrowhead 10, a counter-force is produced by the plate spring 2 in proportion to the displacement amount. This displacement amount is used as the measuring range when it is within the predetermined threshold value.
JP18857188A 1987-07-30 1988-07-29 Spring system for supporting displaceable member Pending JPS6446041A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19873725206 DE3725206A1 (en) 1987-07-30 1987-07-30 SPRING SYSTEM FOR THE STORAGE OF A DEFLECTABLE ELEMENT

Publications (1)

Publication Number Publication Date
JPS6446041A true JPS6446041A (en) 1989-02-20

Family

ID=6332672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18857188A Pending JPS6446041A (en) 1987-07-30 1988-07-29 Spring system for supporting displaceable member

Country Status (3)

Country Link
JP (1) JPS6446041A (en)
DE (1) DE3725206A1 (en)
GB (1) GB2207976B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009503460A (en) * 2005-07-26 2009-01-29 カール ツァイス インドゥストリーレ メステクニーク ゲーエムベーハー Sensor module for probe of tactile coordinate measuring device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59308901D1 (en) * 1992-11-26 1998-09-24 Fredart Sondermasch Gmbh COORDINATE MEASUREMENT METHOD AND DEVICE

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009503460A (en) * 2005-07-26 2009-01-29 カール ツァイス インドゥストリーレ メステクニーク ゲーエムベーハー Sensor module for probe of tactile coordinate measuring device

Also Published As

Publication number Publication date
GB2207976B (en) 1991-05-29
DE3725206A1 (en) 1989-02-09
GB8817683D0 (en) 1988-09-01
GB2207976A (en) 1989-02-15

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