JPS6444803A - Scanning-type tunnel unit - Google Patents
Scanning-type tunnel unitInfo
- Publication number
- JPS6444803A JPS6444803A JP20128287A JP20128287A JPS6444803A JP S6444803 A JPS6444803 A JP S6444803A JP 20128287 A JP20128287 A JP 20128287A JP 20128287 A JP20128287 A JP 20128287A JP S6444803 A JPS6444803 A JP S6444803A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- probe
- motion stage
- stage
- superfine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
PURPOSE:To obtain a unit facilitating the replacement of a sample and a probe which one hardly impaired substantial and having excellent precision in operation in the Z direction, large equipment rigidity and high usability, by combining a superfine motion stage, a triaxial orthogonal microstage and a rough motion stage so as to drive the sample. CONSTITUTION:In order to make a probe 42 approach the observing surface of a sample in a sample vessel 38, the probe 42 is moved so that a certain tunnel current flows between them, and a physical image of the observing surface of the sample is obtained. A Z clamp 20 making a rough motion vertically is moved to separate the sample from the probe 42 to obtain a wide space, through the intermediary of triaxial orthogonal microstages 28, 30 and 32, a Z superfine motion stage 34 and the vessel 38, and the replacement of the probe 42 and the sample are conducted. Next, by the Z clamp 20, the stages 28, 30 and 32 and the stage 34, a sample is made to approach a probe 42 so that a space between the probe 42 and the sample turns to be a tunnel region gradually. Then, a scanning actuator 16 is driven to move the probe 42 so as to make the tunnel current fixed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62201282A JP2642636B2 (en) | 1987-08-12 | 1987-08-12 | Driving mechanism of probe unit and driving method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62201282A JP2642636B2 (en) | 1987-08-12 | 1987-08-12 | Driving mechanism of probe unit and driving method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6444803A true JPS6444803A (en) | 1989-02-17 |
JP2642636B2 JP2642636B2 (en) | 1997-08-20 |
Family
ID=16438385
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62201282A Expired - Lifetime JP2642636B2 (en) | 1987-08-12 | 1987-08-12 | Driving mechanism of probe unit and driving method thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2642636B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59179805A (en) * | 1983-03-31 | 1984-10-12 | Asahi Chem Ind Co Ltd | Improved method for hollow fiber production |
JPH03115903A (en) * | 1989-09-29 | 1991-05-16 | Kao Corp | Method and device for measuring surface shape |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4343993A (en) * | 1979-09-20 | 1982-08-10 | International Business Machines Corporation | Scanning tunneling microscope |
JPS59101834A (en) * | 1982-12-03 | 1984-06-12 | Hitachi Ltd | Precision plane shifter |
-
1987
- 1987-08-12 JP JP62201282A patent/JP2642636B2/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4343993A (en) * | 1979-09-20 | 1982-08-10 | International Business Machines Corporation | Scanning tunneling microscope |
JPS59101834A (en) * | 1982-12-03 | 1984-06-12 | Hitachi Ltd | Precision plane shifter |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59179805A (en) * | 1983-03-31 | 1984-10-12 | Asahi Chem Ind Co Ltd | Improved method for hollow fiber production |
JPH03115903A (en) * | 1989-09-29 | 1991-05-16 | Kao Corp | Method and device for measuring surface shape |
Also Published As
Publication number | Publication date |
---|---|
JP2642636B2 (en) | 1997-08-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
AU1437283A (en) | 7-oxabicyclo 2.2.1 hept-2-yl-5 alkyl/alkenyl carboxylic acids | |
FI844289L (en) | NYA POLYPEPTIDER MED -AMYLASHAEMMANDE VERKAN, FOERFARANDE FOER DERAS FRAMSTAELLNING, DERAS ANVAENDNING OCH PHARMACEUTISKA PREPARAT. | |
PT84493B (en) | PROCESS FOR THE PREPARATION OF NEW POLYPEPTIDE ACTIVATORS OF PLASMINOGENE TYPE HUMAN FABRICS | |
ATE250133T1 (en) | CTOR-MEDIATED GENOME INSERTION AND EXPRESSION OF DNA IN BCG | |
JPS6444803A (en) | Scanning-type tunnel unit | |
GB2011814A (en) | Apparatus for Turning over Workpieces | |
IL70526A (en) | Method and apparatus for scanning two fields of view by optical/mechanical means | |
GB2186737B (en) | Improvements relating to specimen chambers for scanning electron beam instruments | |
DE3875890D1 (en) | Refractory Oxide Compound / Refractory Hard Metal Composite. | |
Fisher | Specimen holder for controlled deformation in the Elmiskop | |
DE3463500D1 (en) | Monoester of celiprolol comprising optically active, disubstituted tartaric acids, their preparation and use | |
RU1833387C (en) | Method of synthesis of crystalline form of mono-(n,n-dimethylformamide)-1-carbacephalosporin solvate | |
Bush et al. | An electric micromanipulator | |
JPS5590231A (en) | Electric discharge machining device | |
JP2534403Y2 (en) | Micromanipulator | |
SU884941A1 (en) | Rest | |
Saga et al. | Combined High Resolution Electron Microscope/Atom Probe--Field Ion Microscope Approach to the Characterization of Microstructures in Materials | |
Farkas et al. | Control of the Operation in Alumina Production by Measuring the Electrical Conductivity of the Circulating Lyes | |
JPH01187402A (en) | Scan tunnel microscope | |
JPS5457862A (en) | Ion-beam irradiation device | |
JPS52101092A (en) | Acid dissolving method and apparatus for solid analytical specimens us ing heat evolved with electrolysis | |
JPS5459871A (en) | Plane display unit and its manufacture | |
JPS51116392A (en) | A sample driving method in super high vacuum | |
JPS5665916A (en) | Driving device of walking beam furnace | |
JPS51129283A (en) | Examination method of glass bottles |