JPS6444803A - Scanning-type tunnel unit - Google Patents

Scanning-type tunnel unit

Info

Publication number
JPS6444803A
JPS6444803A JP20128287A JP20128287A JPS6444803A JP S6444803 A JPS6444803 A JP S6444803A JP 20128287 A JP20128287 A JP 20128287A JP 20128287 A JP20128287 A JP 20128287A JP S6444803 A JPS6444803 A JP S6444803A
Authority
JP
Japan
Prior art keywords
sample
probe
motion stage
stage
superfine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20128287A
Other languages
Japanese (ja)
Other versions
JP2642636B2 (en
Inventor
Toshihito Kawachi
Shuzo Mishima
Haruo Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP62201282A priority Critical patent/JP2642636B2/en
Publication of JPS6444803A publication Critical patent/JPS6444803A/en
Application granted granted Critical
Publication of JP2642636B2 publication Critical patent/JP2642636B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

PURPOSE:To obtain a unit facilitating the replacement of a sample and a probe which one hardly impaired substantial and having excellent precision in operation in the Z direction, large equipment rigidity and high usability, by combining a superfine motion stage, a triaxial orthogonal microstage and a rough motion stage so as to drive the sample. CONSTITUTION:In order to make a probe 42 approach the observing surface of a sample in a sample vessel 38, the probe 42 is moved so that a certain tunnel current flows between them, and a physical image of the observing surface of the sample is obtained. A Z clamp 20 making a rough motion vertically is moved to separate the sample from the probe 42 to obtain a wide space, through the intermediary of triaxial orthogonal microstages 28, 30 and 32, a Z superfine motion stage 34 and the vessel 38, and the replacement of the probe 42 and the sample are conducted. Next, by the Z clamp 20, the stages 28, 30 and 32 and the stage 34, a sample is made to approach a probe 42 so that a space between the probe 42 and the sample turns to be a tunnel region gradually. Then, a scanning actuator 16 is driven to move the probe 42 so as to make the tunnel current fixed.
JP62201282A 1987-08-12 1987-08-12 Driving mechanism of probe unit and driving method thereof Expired - Lifetime JP2642636B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62201282A JP2642636B2 (en) 1987-08-12 1987-08-12 Driving mechanism of probe unit and driving method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62201282A JP2642636B2 (en) 1987-08-12 1987-08-12 Driving mechanism of probe unit and driving method thereof

Publications (2)

Publication Number Publication Date
JPS6444803A true JPS6444803A (en) 1989-02-17
JP2642636B2 JP2642636B2 (en) 1997-08-20

Family

ID=16438385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62201282A Expired - Lifetime JP2642636B2 (en) 1987-08-12 1987-08-12 Driving mechanism of probe unit and driving method thereof

Country Status (1)

Country Link
JP (1) JP2642636B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59179805A (en) * 1983-03-31 1984-10-12 Asahi Chem Ind Co Ltd Improved method for hollow fiber production
JPH03115903A (en) * 1989-09-29 1991-05-16 Kao Corp Method and device for measuring surface shape

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4343993A (en) * 1979-09-20 1982-08-10 International Business Machines Corporation Scanning tunneling microscope
JPS59101834A (en) * 1982-12-03 1984-06-12 Hitachi Ltd Precision plane shifter

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4343993A (en) * 1979-09-20 1982-08-10 International Business Machines Corporation Scanning tunneling microscope
JPS59101834A (en) * 1982-12-03 1984-06-12 Hitachi Ltd Precision plane shifter

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59179805A (en) * 1983-03-31 1984-10-12 Asahi Chem Ind Co Ltd Improved method for hollow fiber production
JPH03115903A (en) * 1989-09-29 1991-05-16 Kao Corp Method and device for measuring surface shape

Also Published As

Publication number Publication date
JP2642636B2 (en) 1997-08-20

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