GB2186737B - Improvements relating to specimen chambers for scanning electron beam instruments - Google Patents

Improvements relating to specimen chambers for scanning electron beam instruments

Info

Publication number
GB2186737B
GB2186737B GB8628900A GB8628900A GB2186737B GB 2186737 B GB2186737 B GB 2186737B GB 8628900 A GB8628900 A GB 8628900A GB 8628900 A GB8628900 A GB 8628900A GB 2186737 B GB2186737 B GB 2186737B
Authority
GB
United Kingdom
Prior art keywords
electron beam
scanning electron
improvements relating
specimen chambers
beam instruments
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB8628900A
Other versions
GB2186737A (en
GB8628900D0 (en
Inventor
Jitendra Shantilal Shah
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cambridge Instruments Ltd
Original Assignee
Cambridge Instruments Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cambridge Instruments Ltd filed Critical Cambridge Instruments Ltd
Publication of GB8628900D0 publication Critical patent/GB8628900D0/en
Priority to EP19870901437 priority Critical patent/EP0263839A1/en
Priority to PCT/EP1987/000077 priority patent/WO1987005150A1/en
Publication of GB2186737A publication Critical patent/GB2186737A/en
Application granted granted Critical
Publication of GB2186737B publication Critical patent/GB2186737B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2002—Controlling environment of sample
    • H01J2237/2003—Environmental cells

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB8628900A 1986-02-18 1986-12-03 Improvements relating to specimen chambers for scanning electron beam instruments Expired - Fee Related GB2186737B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP19870901437 EP0263839A1 (en) 1986-02-18 1987-02-16 Specimen chamber for scanning electron beam instruments
PCT/EP1987/000077 WO1987005150A1 (en) 1986-02-18 1987-02-16 Specimen chamber for scanning electron beam instruments

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB868604004A GB8604004D0 (en) 1986-02-18 1986-02-18 Specimen chamber

Publications (3)

Publication Number Publication Date
GB8628900D0 GB8628900D0 (en) 1987-01-07
GB2186737A GB2186737A (en) 1987-08-19
GB2186737B true GB2186737B (en) 1990-07-04

Family

ID=10593271

Family Applications (2)

Application Number Title Priority Date Filing Date
GB868604004A Pending GB8604004D0 (en) 1986-02-18 1986-02-18 Specimen chamber
GB8628900A Expired - Fee Related GB2186737B (en) 1986-02-18 1986-12-03 Improvements relating to specimen chambers for scanning electron beam instruments

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB868604004A Pending GB8604004D0 (en) 1986-02-18 1986-02-18 Specimen chamber

Country Status (1)

Country Link
GB (2) GB8604004D0 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0324213A1 (en) * 1988-01-12 1989-07-19 Electro-Scan Corporation Scanning electron microscope for visualization of wet samples
US4897545A (en) * 1987-05-21 1990-01-30 Electroscan Corporation Electron detector for use in a gaseous environment
US4880976A (en) * 1987-05-21 1989-11-14 Electroscan Corporation Secondary electron detector for use in a gaseous atmosphere
US5250808A (en) * 1987-05-21 1993-10-05 Electroscan Corporation Integrated electron optical/differential pumping/imaging signal system for an environmental scanning electron microscope
US5362964A (en) * 1993-07-30 1994-11-08 Electroscan Corporation Environmental scanning electron microscope
US5412211A (en) * 1993-07-30 1995-05-02 Electroscan Corporation Environmental scanning electron microscope
GB9916804D0 (en) * 1999-07-16 1999-09-22 Shah Jitendra S Scanning beam instruments
US6674076B1 (en) * 2002-12-12 2004-01-06 Ballard Power Systems Inc. Humidified imaging with an environmental scanning electron microscope
US8921811B2 (en) * 2007-02-06 2014-12-30 Fei Company High pressure charged particle beam system
US9679741B2 (en) 2010-11-09 2017-06-13 Fei Company Environmental cell for charged particle beam system
EP2838108A1 (en) * 2013-08-12 2015-02-18 Fei Company Method of using an environmental transmission electron microscope

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1284708A (en) * 1970-02-07 1972-08-09 Siemens Ag Electron beam apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1284708A (en) * 1970-02-07 1972-08-09 Siemens Ag Electron beam apparatus

Also Published As

Publication number Publication date
GB2186737A (en) 1987-08-19
GB8604004D0 (en) 1986-03-26
GB8628900D0 (en) 1987-01-07

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20051203