GB9916804D0 - Scanning beam instruments - Google Patents

Scanning beam instruments

Info

Publication number
GB9916804D0
GB9916804D0 GBGB9916804.9A GB9916804A GB9916804D0 GB 9916804 D0 GB9916804 D0 GB 9916804D0 GB 9916804 A GB9916804 A GB 9916804A GB 9916804 D0 GB9916804 D0 GB 9916804D0
Authority
GB
United Kingdom
Prior art keywords
scanning beam
beam instruments
instruments
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB9916804.9A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHAH JITENDRA S
Original Assignee
SHAH JITENDRA S
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHAH JITENDRA S filed Critical SHAH JITENDRA S
Priority to GBGB9916804.9A priority Critical patent/GB9916804D0/en
Publication of GB9916804D0 publication Critical patent/GB9916804D0/en
Priority to AU61675/00A priority patent/AU6167500A/en
Priority to PCT/GB2000/002676 priority patent/WO2001006536A2/en
Ceased legal-status Critical Current

Links

GBGB9916804.9A 1999-07-16 1999-07-16 Scanning beam instruments Ceased GB9916804D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GBGB9916804.9A GB9916804D0 (en) 1999-07-16 1999-07-16 Scanning beam instruments
AU61675/00A AU6167500A (en) 1999-07-16 2000-07-12 Scanning beam instruments
PCT/GB2000/002676 WO2001006536A2 (en) 1999-07-16 2000-07-12 Scanning beam instruments

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9916804.9A GB9916804D0 (en) 1999-07-16 1999-07-16 Scanning beam instruments

Publications (1)

Publication Number Publication Date
GB9916804D0 true GB9916804D0 (en) 1999-09-22

Family

ID=10857436

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9916804.9A Ceased GB9916804D0 (en) 1999-07-16 1999-07-16 Scanning beam instruments

Country Status (3)

Country Link
AU (1) AU6167500A (en)
GB (1) GB9916804D0 (en)
WO (1) WO2001006536A2 (en)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59127353A (en) * 1983-01-10 1984-07-23 Jeol Ltd Secondary electron detecting system in ion beam apparatus
GB8604004D0 (en) * 1986-02-18 1986-03-26 Cambridge Instr Ltd Specimen chamber
US4983833A (en) * 1988-11-21 1991-01-08 Siemens Aktiengesellschaft Device for the detecting of charged secondary particles
JP2794471B2 (en) * 1989-11-24 1998-09-03 日本電子テクニクス株式会社 electronic microscope
JP3081393B2 (en) * 1992-10-15 2000-08-28 株式会社日立製作所 Scanning electron microscope
JPH08279346A (en) * 1995-04-05 1996-10-22 Jeol Ltd Scanning type electron microscope
JPH09293479A (en) * 1996-04-26 1997-11-11 Shimadzu Corp Electron beam analyzing device
US6005247A (en) * 1997-10-01 1999-12-21 Intevac, Inc. Electron beam microscope using electron beam patterns
JP4176159B2 (en) * 1997-12-08 2008-11-05 エフ イー アイ カンパニ Environmentally controlled SEM using magnetic field for improved secondary electron detection

Also Published As

Publication number Publication date
AU6167500A (en) 2001-02-05
WO2001006536A2 (en) 2001-01-25
WO2001006536A3 (en) 2002-01-31

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)