WO2001006536A3 - Scanning beam instruments - Google Patents

Scanning beam instruments Download PDF

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Publication number
WO2001006536A3
WO2001006536A3 PCT/GB2000/002676 GB0002676W WO0106536A3 WO 2001006536 A3 WO2001006536 A3 WO 2001006536A3 GB 0002676 W GB0002676 W GB 0002676W WO 0106536 A3 WO0106536 A3 WO 0106536A3
Authority
WO
WIPO (PCT)
Prior art keywords
specimen
vicinity
charged particles
field
detector
Prior art date
Application number
PCT/GB2000/002676
Other languages
French (fr)
Other versions
WO2001006536A2 (en
Inventor
Jitendra Shantilal Shah
Original Assignee
Leo Electron Microscopy Ltd
Jitendra Shantilal Shah
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leo Electron Microscopy Ltd, Jitendra Shantilal Shah filed Critical Leo Electron Microscopy Ltd
Priority to AU61675/00A priority Critical patent/AU6167500A/en
Publication of WO2001006536A2 publication Critical patent/WO2001006536A2/en
Publication of WO2001006536A3 publication Critical patent/WO2001006536A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/026—Shields
    • H01J2237/0264—Shields magnetic

Abstract

A scanning beam instrument, such as a scanning electron microscope has a beam column (2) which generates a beam of charged particles which are focussed on a specimen (6) in a specimen chamber (4). Charged particles from the specimen (6) and the vicinity of the specimen are detected by a suitable detector. In one aspect, an arrangement is disclosed in which a magnetic field is generated (70, 72) in the vicinity of the specimen and magnetic shielding is provided in the specimen chamber (4) for containing the field. The magnetic field may be substantially parallel to the surface of the specimen (6) and may also be substantially perpendicular to the axis of the beam (8). In another aspect an electric field is generated (54, 56) substantially parallel to the surface of the specimen (6), and preferably substantially perpendicular to the axis of the beam (8), this electric field is crossed with the magnetic field, and the detector has an electrode (54) substantially perpendicular to the surface of the specimen. In another aspect, the electric and magnetic fields are such as to direct charged particles from the specimen and the vicinity of the specimen to the perpendicular detector electrode (54).
PCT/GB2000/002676 1999-07-16 2000-07-12 Scanning beam instruments WO2001006536A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU61675/00A AU6167500A (en) 1999-07-16 2000-07-12 Scanning beam instruments

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9916804.9 1999-07-16
GBGB9916804.9A GB9916804D0 (en) 1999-07-16 1999-07-16 Scanning beam instruments

Publications (2)

Publication Number Publication Date
WO2001006536A2 WO2001006536A2 (en) 2001-01-25
WO2001006536A3 true WO2001006536A3 (en) 2002-01-31

Family

ID=10857436

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2000/002676 WO2001006536A2 (en) 1999-07-16 2000-07-12 Scanning beam instruments

Country Status (3)

Country Link
AU (1) AU6167500A (en)
GB (1) GB9916804D0 (en)
WO (1) WO2001006536A2 (en)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59127353A (en) * 1983-01-10 1984-07-23 Jeol Ltd Secondary electron detecting system in ion beam apparatus
GB2186737A (en) * 1986-02-18 1987-08-19 Cambridge Instr Ltd Specimen chamber for scanning electron beam instruments
US4983833A (en) * 1988-11-21 1991-01-08 Siemens Aktiengesellschaft Device for the detecting of charged secondary particles
US5097134A (en) * 1989-11-24 1992-03-17 Jeol Technics Ltd. Scanning electron microscope
JPH08279346A (en) * 1995-04-05 1996-10-22 Jeol Ltd Scanning type electron microscope
JPH09293479A (en) * 1996-04-26 1997-11-11 Shimadzu Corp Electron beam analyzing device
EP0817235A1 (en) * 1992-10-15 1998-01-07 Hitachi, Ltd. A scanning electron microscope
WO1999017332A1 (en) * 1997-10-01 1999-04-08 Intevac, Inc. Electron beam microscope using electron beam patterns
WO1999030345A1 (en) * 1997-12-08 1999-06-17 Philips Electron Optics B.V. Environmental sem with a magnetic field for improved secondary electron detection

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59127353A (en) * 1983-01-10 1984-07-23 Jeol Ltd Secondary electron detecting system in ion beam apparatus
GB2186737A (en) * 1986-02-18 1987-08-19 Cambridge Instr Ltd Specimen chamber for scanning electron beam instruments
US4983833A (en) * 1988-11-21 1991-01-08 Siemens Aktiengesellschaft Device for the detecting of charged secondary particles
US5097134A (en) * 1989-11-24 1992-03-17 Jeol Technics Ltd. Scanning electron microscope
EP0817235A1 (en) * 1992-10-15 1998-01-07 Hitachi, Ltd. A scanning electron microscope
JPH08279346A (en) * 1995-04-05 1996-10-22 Jeol Ltd Scanning type electron microscope
JPH09293479A (en) * 1996-04-26 1997-11-11 Shimadzu Corp Electron beam analyzing device
WO1999017332A1 (en) * 1997-10-01 1999-04-08 Intevac, Inc. Electron beam microscope using electron beam patterns
WO1999030345A1 (en) * 1997-12-08 1999-06-17 Philips Electron Optics B.V. Environmental sem with a magnetic field for improved secondary electron detection

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 02 28 February 1997 (1997-02-28) *
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 03 27 February 1998 (1998-02-27) *
PATENT ABSTRACTS OF JAPAN vol. 8, no. 250 16 November 1984 (1984-11-16) *

Also Published As

Publication number Publication date
GB9916804D0 (en) 1999-09-22
WO2001006536A2 (en) 2001-01-25
AU6167500A (en) 2001-02-05

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