JPS6441192A - Thin film electroluminescent display element - Google Patents
Thin film electroluminescent display elementInfo
- Publication number
- JPS6441192A JPS6441192A JP62197469A JP19746987A JPS6441192A JP S6441192 A JPS6441192 A JP S6441192A JP 62197469 A JP62197469 A JP 62197469A JP 19746987 A JP19746987 A JP 19746987A JP S6441192 A JPS6441192 A JP S6441192A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- polyimide resin
- thin film
- display element
- composite film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 3
- 239000002131 composite material Substances 0.000 abstract 3
- 229920001721 polyimide Polymers 0.000 abstract 3
- 239000009719 polyimide resin Substances 0.000 abstract 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract 2
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- 230000035699 permeability Effects 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Abstract
PURPOSE:To aim at improvement in moisture resistance by laminating a composite film, consisting of a polyimide resin layer and a silicon oxide or silicon nitride layer, on the side of a luminous part of an electroluminescent element body. CONSTITUTION:A composite film 21 consisting of a silicon oxide or silicon nitride layer 22 and a polyimide resin layer 23 is formed on a luminous part 7 of EL element body 20. SiO2 or Si3N4 or the like of the layer 22 forms such a film that is very few in pinholes, while polyimide resin forms such a layer that is less in moisture permeability and excellent in heat resistance. Consequently, moisture permeation is almost completely kept back by the composite film 21, thus the moisture resistance is improved.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62197469A JPS6441192A (en) | 1987-08-07 | 1987-08-07 | Thin film electroluminescent display element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62197469A JPS6441192A (en) | 1987-08-07 | 1987-08-07 | Thin film electroluminescent display element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6441192A true JPS6441192A (en) | 1989-02-13 |
Family
ID=16375007
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62197469A Pending JPS6441192A (en) | 1987-08-07 | 1987-08-07 | Thin film electroluminescent display element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6441192A (en) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0969389A (en) * | 1995-08-31 | 1997-03-11 | Seikosha Co Ltd | Electroluminescent element |
JP2002221911A (en) * | 2001-01-24 | 2002-08-09 | Sony Corp | Display device and its manufacturing method |
JP2004281247A (en) * | 2003-03-17 | 2004-10-07 | Pioneer Electronic Corp | Organic electroluminescent display panel and its manufacturing method |
WO2006104078A1 (en) * | 2005-03-29 | 2006-10-05 | Three Bond Co., Ltd. | Organic el element sealing film and organic el element sealing structure |
JP2007066580A (en) * | 2005-08-29 | 2007-03-15 | Toyota Industries Corp | Organic electroluminescent element and its manufacturing method |
KR20130129969A (en) | 2010-12-07 | 2013-11-29 | 도쿄엘렉트론가부시키가이샤 | Display device manufacturing apparatus, display device manufacturing method, and display device |
US8674397B2 (en) | 2010-06-23 | 2014-03-18 | Tokyo Electron Limited | Sealing film forming method, sealing film forming device, and light-emitting device |
US8900366B2 (en) | 2002-04-15 | 2014-12-02 | Samsung Display Co., Ltd. | Apparatus for depositing a multilayer coating on discrete sheets |
JP2015216083A (en) * | 2014-05-13 | 2015-12-03 | 株式会社ジャパンディスプレイ | Organic EL light-emitting device |
US9839940B2 (en) | 2002-04-15 | 2017-12-12 | Samsung Display Co., Ltd. | Apparatus for depositing a multilayer coating on discrete sheets |
-
1987
- 1987-08-07 JP JP62197469A patent/JPS6441192A/en active Pending
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0969389A (en) * | 1995-08-31 | 1997-03-11 | Seikosha Co Ltd | Electroluminescent element |
JP2002221911A (en) * | 2001-01-24 | 2002-08-09 | Sony Corp | Display device and its manufacturing method |
US8900366B2 (en) | 2002-04-15 | 2014-12-02 | Samsung Display Co., Ltd. | Apparatus for depositing a multilayer coating on discrete sheets |
US9839940B2 (en) | 2002-04-15 | 2017-12-12 | Samsung Display Co., Ltd. | Apparatus for depositing a multilayer coating on discrete sheets |
JP2004281247A (en) * | 2003-03-17 | 2004-10-07 | Pioneer Electronic Corp | Organic electroluminescent display panel and its manufacturing method |
WO2006104078A1 (en) * | 2005-03-29 | 2006-10-05 | Three Bond Co., Ltd. | Organic el element sealing film and organic el element sealing structure |
JP4941295B2 (en) * | 2005-03-29 | 2012-05-30 | 株式会社スリーボンド | Organic EL element sealing film and organic EL element sealing structure |
TWI407611B (en) * | 2005-03-29 | 2013-09-01 | Three Bond Co Ltd | Film for sealing organic el element and sealed structure of organic el element |
JP2007066580A (en) * | 2005-08-29 | 2007-03-15 | Toyota Industries Corp | Organic electroluminescent element and its manufacturing method |
US8674397B2 (en) | 2010-06-23 | 2014-03-18 | Tokyo Electron Limited | Sealing film forming method, sealing film forming device, and light-emitting device |
KR20130129969A (en) | 2010-12-07 | 2013-11-29 | 도쿄엘렉트론가부시키가이샤 | Display device manufacturing apparatus, display device manufacturing method, and display device |
JP2015216083A (en) * | 2014-05-13 | 2015-12-03 | 株式会社ジャパンディスプレイ | Organic EL light-emitting device |
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