JPS6439639U - - Google Patents
Info
- Publication number
- JPS6439639U JPS6439639U JP13475187U JP13475187U JPS6439639U JP S6439639 U JPS6439639 U JP S6439639U JP 13475187 U JP13475187 U JP 13475187U JP 13475187 U JP13475187 U JP 13475187U JP S6439639 U JPS6439639 U JP S6439639U
- Authority
- JP
- Japan
- Prior art keywords
- wafer cassette
- gripping device
- detection rod
- arm body
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 10
- 238000010586 diagram Methods 0.000 description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987134751U JPH0547468Y2 (en, 2012) | 1987-09-03 | 1987-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987134751U JPH0547468Y2 (en, 2012) | 1987-09-03 | 1987-09-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6439639U true JPS6439639U (en, 2012) | 1989-03-09 |
| JPH0547468Y2 JPH0547468Y2 (en, 2012) | 1993-12-14 |
Family
ID=31393783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987134751U Expired - Lifetime JPH0547468Y2 (en, 2012) | 1987-09-03 | 1987-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0547468Y2 (en, 2012) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58181484U (ja) * | 1982-05-28 | 1983-12-03 | ぺんてる株式会社 | 高さ検出センサ付チヤツク装置 |
| JPS5977226U (ja) * | 1982-11-15 | 1984-05-25 | 三菱電機株式会社 | 半導体ウエ−ハのカセツト取扱い具 |
| JPS6257227A (ja) * | 1985-09-06 | 1987-03-12 | Nippon Telegr & Teleph Corp <Ntt> | ウエハキヤリアハンドリング装置 |
-
1987
- 1987-09-03 JP JP1987134751U patent/JPH0547468Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58181484U (ja) * | 1982-05-28 | 1983-12-03 | ぺんてる株式会社 | 高さ検出センサ付チヤツク装置 |
| JPS5977226U (ja) * | 1982-11-15 | 1984-05-25 | 三菱電機株式会社 | 半導体ウエ−ハのカセツト取扱い具 |
| JPS6257227A (ja) * | 1985-09-06 | 1987-03-12 | Nippon Telegr & Teleph Corp <Ntt> | ウエハキヤリアハンドリング装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0547468Y2 (en, 2012) | 1993-12-14 |