JPS6437738A - Production of optical disk substrate - Google Patents

Production of optical disk substrate

Info

Publication number
JPS6437738A
JPS6437738A JP19280987A JP19280987A JPS6437738A JP S6437738 A JPS6437738 A JP S6437738A JP 19280987 A JP19280987 A JP 19280987A JP 19280987 A JP19280987 A JP 19280987A JP S6437738 A JPS6437738 A JP S6437738A
Authority
JP
Japan
Prior art keywords
optical disk
substrate
disk substrate
mold
molding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19280987A
Other languages
Japanese (ja)
Inventor
Mitsuo Yamada
Masahiro Rikukawa
Takeshi Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP19280987A priority Critical patent/JPS6437738A/en
Publication of JPS6437738A publication Critical patent/JPS6437738A/en
Pending legal-status Critical Current

Links

Landscapes

  • Manufacturing Optical Record Carriers (AREA)

Abstract

PURPOSE:To form a stamper for an optical disk having high productivity by forming a resist pattern to the prescribed position on a metallic substrate, etching the prescribed part of the metallic substrate and removing the resist to form a mold for molding the optical disk substrate having rugged structure and reproducing the substrate by using this mold. CONSTITUTION:After a resist layer 12 is formed on the metallic substrate 11, the resist layer 12 is subjected to photoirradiation then to developing and cleaning to form the resist pattern 14. The prescribed part of the metallic substrate is etched, then the resist layer is swollen by a chemical or is ashed in oxygen plasma generated by a high-frequency discharge, by which the resist pattern 14 is removed. The resulted mold for molding the optical disk substrate having the rugged structure is used and a resin is cured between the mold for molding the optical disk substrate and a keep plate, by which the optical disk substrate is produced. The disk substrate having the high productivity is thereby obtd.
JP19280987A 1987-07-31 1987-07-31 Production of optical disk substrate Pending JPS6437738A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19280987A JPS6437738A (en) 1987-07-31 1987-07-31 Production of optical disk substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19280987A JPS6437738A (en) 1987-07-31 1987-07-31 Production of optical disk substrate

Publications (1)

Publication Number Publication Date
JPS6437738A true JPS6437738A (en) 1989-02-08

Family

ID=16297349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19280987A Pending JPS6437738A (en) 1987-07-31 1987-07-31 Production of optical disk substrate

Country Status (1)

Country Link
JP (1) JPS6437738A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02204023A (en) * 1989-02-02 1990-08-14 Sanyo Electric Co Ltd Stamper for optical disc and manufacture thereof
WO1998027551A1 (en) * 1996-12-19 1998-06-25 Innovators Ag Master for producing optical discs

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02204023A (en) * 1989-02-02 1990-08-14 Sanyo Electric Co Ltd Stamper for optical disc and manufacture thereof
WO1998027551A1 (en) * 1996-12-19 1998-06-25 Innovators Ag Master for producing optical discs
US6163523A (en) * 1996-12-19 2000-12-19 Innovators Ag Metal master for producing optical discs

Similar Documents

Publication Publication Date Title
ES8103476A1 (en) Method of producing a solid state device by differential plasma etching of resists.
KR100930177B1 (en) Manufacturing method of stamp for nano imprint
JPS6437738A (en) Production of optical disk substrate
JPS6437737A (en) Production of optical disk substrate
JPS6446702A (en) Production of antidazzle filter
JPS5633827A (en) Photo etching method including surface treatment of substrate
JPH02150325A (en) Stamper for optical disk and optical disk base plate
JPS643837A (en) Production of reproducing mold
JPS6437739A (en) Production of optical disk substrate
JPH03252936A (en) Stamper for optical disk
JPH02139216A (en) Molding method of three-dimensional molding circuit
JPS57205704A (en) Production of die for molding multicored connector for optical fiber
JPH02204023A (en) Stamper for optical disc and manufacture thereof
JPS6473519A (en) Production of thin film magnetic head
JPS6484694A (en) Manufacture of insulating substrate provided with conductive layer
KR20020093936A (en) Method for producing original record of optical recording medium
JPH0688254B2 (en) Method for manufacturing mold for fine pattern duplication
JPH02245322A (en) Manufacture of stamper for optical disc and of optical disc board utilizing the same
JPH01251452A (en) Manufacture of optical disk substrate
JPS63275053A (en) Production of stamper
JPS56130716A (en) Manufacture of electrode substrate for liquid-crystal display element
JPS63311640A (en) Production of optical disk substrate
JPS6132718A (en) Preparation of mold for molding synthetic resin
JP2995754B2 (en) Manufacturing method of stamper
JP2001216690A (en) Direct mastering method and device for the same