JPS64370A - Cryopump - Google Patents

Cryopump

Info

Publication number
JPS64370A
JPS64370A JP15120487A JP15120487A JPS64370A JP S64370 A JPS64370 A JP S64370A JP 15120487 A JP15120487 A JP 15120487A JP 15120487 A JP15120487 A JP 15120487A JP S64370 A JPS64370 A JP S64370A
Authority
JP
Japan
Prior art keywords
panel
panels
cold stages
cryopump
cooled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15120487A
Other languages
Japanese (ja)
Other versions
JPH01370A (en
Inventor
Norihide Saho
Minoru Imamura
Yukiyoshi Yoshimatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15120487A priority Critical patent/JPS64370A/en
Publication of JPH01370A publication Critical patent/JPH01370A/en
Publication of JPS64370A publication Critical patent/JPS64370A/en
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

PURPOSE: To reduce the heat capacity to be cooled and shorten the pre-cooling time by forming the thickness of panels partially thin in a cryopump bringing the panels into contact with cold stages arranged in a vacuum tank and cooling the panels to the extremely low temperature.
CONSTITUTION: Multiple cold stages 2, 3 are arranged in a vacuum tank 4 fitted with a refrigerator 1, and panels 5, 7 are fitted to the cold stages 2, 3 respectively. When the refrigerator 1 is operated, the cold stages 2, 3 are cooled respectively, and the panels 5, 7 are cooled via the cold stages 2, 3 respectively. In this cryopump, a panel stanchion 5a molded with a cross-shaped copper plate into a panel shape and a thin panel 5b molded into a recess shape so that this panel stanchion 5a can be inserted inside are connected to form one panel 5. The thickness of the panel 5 is thereby formed partially thin.
COPYRIGHT: (C)1989,JPO&Japio
JP15120487A 1987-06-19 1987-06-19 Cryopump Pending JPS64370A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15120487A JPS64370A (en) 1987-06-19 1987-06-19 Cryopump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15120487A JPS64370A (en) 1987-06-19 1987-06-19 Cryopump

Publications (2)

Publication Number Publication Date
JPH01370A JPH01370A (en) 1989-01-05
JPS64370A true JPS64370A (en) 1989-01-05

Family

ID=15513514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15120487A Pending JPS64370A (en) 1987-06-19 1987-06-19 Cryopump

Country Status (1)

Country Link
JP (1) JPS64370A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4932964A (en) * 1987-12-07 1990-06-12 Sulzer Brothers Limited Artificial body for a prosthesis
JP2008202491A (en) * 2007-02-20 2008-09-04 Edwards Kk Cryopanel cooling structure and cooling method thereof
JP2021503577A (en) * 2017-11-17 2021-02-12 エドワーズ バキューム リミテッド ライアビリティ カンパニー Cryopump with reinforced front array

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4932964A (en) * 1987-12-07 1990-06-12 Sulzer Brothers Limited Artificial body for a prosthesis
JP2008202491A (en) * 2007-02-20 2008-09-04 Edwards Kk Cryopanel cooling structure and cooling method thereof
JP2021503577A (en) * 2017-11-17 2021-02-12 エドワーズ バキューム リミテッド ライアビリティ カンパニー Cryopump with reinforced front array

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