JPS6437044U - - Google Patents

Info

Publication number
JPS6437044U
JPS6437044U JP13263487U JP13263487U JPS6437044U JP S6437044 U JPS6437044 U JP S6437044U JP 13263487 U JP13263487 U JP 13263487U JP 13263487 U JP13263487 U JP 13263487U JP S6437044 U JPS6437044 U JP S6437044U
Authority
JP
Japan
Prior art keywords
exposed
hole
protrusion
exposure apparatus
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13263487U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0614474Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987132634U priority Critical patent/JPH0614474Y2/ja
Publication of JPS6437044U publication Critical patent/JPS6437044U/ja
Application granted granted Critical
Publication of JPH0614474Y2 publication Critical patent/JPH0614474Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987132634U 1987-08-31 1987-08-31 露光装置における被露光部材保持装置 Expired - Lifetime JPH0614474Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987132634U JPH0614474Y2 (ja) 1987-08-31 1987-08-31 露光装置における被露光部材保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987132634U JPH0614474Y2 (ja) 1987-08-31 1987-08-31 露光装置における被露光部材保持装置

Publications (2)

Publication Number Publication Date
JPS6437044U true JPS6437044U (enrdf_load_stackoverflow) 1989-03-06
JPH0614474Y2 JPH0614474Y2 (ja) 1994-04-13

Family

ID=31389778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987132634U Expired - Lifetime JPH0614474Y2 (ja) 1987-08-31 1987-08-31 露光装置における被露光部材保持装置

Country Status (1)

Country Link
JP (1) JPH0614474Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009237442A (ja) * 2008-03-28 2009-10-15 Ushio Inc 光照射装置及び光照射装置におけるマスクの取り外し方法
US7791198B2 (en) 2007-02-20 2010-09-07 Nec Electronics Corporation Semiconductor device including a coupling region which includes layers of aluminum and copper alloys

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60158625A (ja) * 1984-01-27 1985-08-20 Hitachi Ltd 平板固定装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60158625A (ja) * 1984-01-27 1985-08-20 Hitachi Ltd 平板固定装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7791198B2 (en) 2007-02-20 2010-09-07 Nec Electronics Corporation Semiconductor device including a coupling region which includes layers of aluminum and copper alloys
JP2009237442A (ja) * 2008-03-28 2009-10-15 Ushio Inc 光照射装置及び光照射装置におけるマスクの取り外し方法

Also Published As

Publication number Publication date
JPH0614474Y2 (ja) 1994-04-13

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