JPS6436961U - - Google Patents
Info
- Publication number
- JPS6436961U JPS6436961U JP13336487U JP13336487U JPS6436961U JP S6436961 U JPS6436961 U JP S6436961U JP 13336487 U JP13336487 U JP 13336487U JP 13336487 U JP13336487 U JP 13336487U JP S6436961 U JPS6436961 U JP S6436961U
- Authority
- JP
- Japan
- Prior art keywords
- target
- vacuum chamber
- jigs
- attached
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 238000005468 ion implantation Methods 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13336487U JPS6436961U (cs) | 1987-08-31 | 1987-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13336487U JPS6436961U (cs) | 1987-08-31 | 1987-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6436961U true JPS6436961U (cs) | 1989-03-06 |
Family
ID=31391154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13336487U Pending JPS6436961U (cs) | 1987-08-31 | 1987-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6436961U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017527961A (ja) * | 2014-07-29 | 2017-09-21 | ライカ ミクロジュステーメ ゲーエムベーハー | 低温で凍結試料を積み替えるローディングステーション |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56116617A (en) * | 1980-02-20 | 1981-09-12 | Hitachi Ltd | Ion implantation |
-
1987
- 1987-08-31 JP JP13336487U patent/JPS6436961U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56116617A (en) * | 1980-02-20 | 1981-09-12 | Hitachi Ltd | Ion implantation |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017527961A (ja) * | 2014-07-29 | 2017-09-21 | ライカ ミクロジュステーメ ゲーエムベーハー | 低温で凍結試料を積み替えるローディングステーション |
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