JPS6358455U - - Google Patents
Info
- Publication number
- JPS6358455U JPS6358455U JP15269886U JP15269886U JPS6358455U JP S6358455 U JPS6358455 U JP S6358455U JP 15269886 U JP15269886 U JP 15269886U JP 15269886 U JP15269886 U JP 15269886U JP S6358455 U JPS6358455 U JP S6358455U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- disk
- elevator
- target chamber
- dummy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- 230000007723 transport mechanism Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15269886U JPS6358455U (cs) | 1986-10-03 | 1986-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15269886U JPS6358455U (cs) | 1986-10-03 | 1986-10-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6358455U true JPS6358455U (cs) | 1988-04-19 |
Family
ID=31070910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15269886U Pending JPS6358455U (cs) | 1986-10-03 | 1986-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6358455U (cs) |
-
1986
- 1986-10-03 JP JP15269886U patent/JPS6358455U/ja active Pending
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