JPH0180933U - - Google Patents
Info
- Publication number
- JPH0180933U JPH0180933U JP1987177941U JP17794187U JPH0180933U JP H0180933 U JPH0180933 U JP H0180933U JP 1987177941 U JP1987177941 U JP 1987177941U JP 17794187 U JP17794187 U JP 17794187U JP H0180933 U JPH0180933 U JP H0180933U
- Authority
- JP
- Japan
- Prior art keywords
- loading
- wafers
- elevator mechanism
- transfer device
- wafer transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987177941U JPH0180933U (cs) | 1987-11-20 | 1987-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987177941U JPH0180933U (cs) | 1987-11-20 | 1987-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0180933U true JPH0180933U (cs) | 1989-05-30 |
Family
ID=31469586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987177941U Pending JPH0180933U (cs) | 1987-11-20 | 1987-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0180933U (cs) |
-
1987
- 1987-11-20 JP JP1987177941U patent/JPH0180933U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0180933U (cs) | ||
| JPH0363937U (cs) | ||
| JPH0180934U (cs) | ||
| JPS642442U (cs) | ||
| JPS62163951U (cs) | ||
| JPS6132077U (ja) | 半導体ウエハ−の運搬用トレイ | |
| JPS6422035U (cs) | ||
| JPS63195734U (cs) | ||
| JPS63144953U (cs) | ||
| JPH01173940U (cs) | ||
| JPS6351445U (cs) | ||
| JPS6171366U (cs) | ||
| JPH0184433U (cs) | ||
| JPS60927U (ja) | 半導体ウエハ貼付装置 | |
| JPS6252929U (cs) | ||
| JPS6166942U (cs) | ||
| JPS6219740U (cs) | ||
| JPS6322738U (cs) | ||
| JPS5996827U (ja) | 半導体ウエ−ハ収納容器 | |
| JPH0364931U (cs) | ||
| JPH0279036U (cs) | ||
| JPH0184436U (cs) | ||
| JPS63137939U (cs) | ||
| JPS59188664U (ja) | ウエハ用カセツトケ−スの装填装置 | |
| JPS61179749U (cs) |