JPH01130251U - - Google Patents
Info
- Publication number
- JPH01130251U JPH01130251U JP2710788U JP2710788U JPH01130251U JP H01130251 U JPH01130251 U JP H01130251U JP 2710788 U JP2710788 U JP 2710788U JP 2710788 U JP2710788 U JP 2710788U JP H01130251 U JPH01130251 U JP H01130251U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- target
- exhaust
- outside
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2710788U JPH01130251U (cs) | 1988-02-29 | 1988-02-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2710788U JPH01130251U (cs) | 1988-02-29 | 1988-02-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01130251U true JPH01130251U (cs) | 1989-09-05 |
Family
ID=31249327
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2710788U Pending JPH01130251U (cs) | 1988-02-29 | 1988-02-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01130251U (cs) |
-
1988
- 1988-02-29 JP JP2710788U patent/JPH01130251U/ja active Pending