JPS6436408A - Cutter for semiconductor single-crystalline bar - Google Patents

Cutter for semiconductor single-crystalline bar

Info

Publication number
JPS6436408A
JPS6436408A JP62192474A JP19247487A JPS6436408A JP S6436408 A JPS6436408 A JP S6436408A JP 62192474 A JP62192474 A JP 62192474A JP 19247487 A JP19247487 A JP 19247487A JP S6436408 A JPS6436408 A JP S6436408A
Authority
JP
Japan
Prior art keywords
blade
distance
detected
sensor
inner circumferential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62192474A
Other languages
Japanese (ja)
Inventor
Yutaka Kubodera
Kazunari Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP62192474A priority Critical patent/JPS6436408A/en
Priority to US07/223,802 priority patent/US4971021A/en
Priority to IT2152288A priority patent/IT1226469B/en
Priority to KR1019880009648A priority patent/KR940011179B1/en
Publication of JPS6436408A publication Critical patent/JPS6436408A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D47/00—Sawing machines or sawing devices working with circular saw blades, characterised only by constructional features of particular parts
    • B23D47/005—Vibration-damping

Abstract

PURPOSE:To detect an accurate warp without being affected by facial deviation of an inner circumferential blade, by a method wherein a distance between the inner circumferential blade and a fixed position facing upon the same is detected synchronously with detecting timing of a mark put down on a fixed position of the inner circumferential blade. CONSTITUTION:A distance sensor 2 provided on a fixed position facing upon a blade 1 puts out an analog signal by detecting a distance between the distance sensor 2 and a blade 1 continuously. A detected signal including a facial deviation of the blade 1, a warp and a ripple ingredient of a power source noise is treated by a sensor amplifier 3 and sensor position detecting part. The detected signal decides that in which state out of the five stages the detected distance exists by comparing in order the detected distance between the blade 1 corresponding to contents of the detected signal and the distance sensor 2 with a predetermined reference value in five stage. Luminous indication of a decision result is performed by an indicator 6 according to a display signal through the sensor position detecting part 4.
JP62192474A 1987-07-31 1987-07-31 Cutter for semiconductor single-crystalline bar Pending JPS6436408A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP62192474A JPS6436408A (en) 1987-07-31 1987-07-31 Cutter for semiconductor single-crystalline bar
US07/223,802 US4971021A (en) 1987-07-31 1988-07-25 Apparatus for cutting semiconductor crystal
IT2152288A IT1226469B (en) 1987-07-31 1988-07-27 APPARATUS TO CUT SEMICONDUCTOR CRYSTAL
KR1019880009648A KR940011179B1 (en) 1987-07-31 1988-07-29 Apparatus for cutting semiconductor crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62192474A JPS6436408A (en) 1987-07-31 1987-07-31 Cutter for semiconductor single-crystalline bar

Publications (1)

Publication Number Publication Date
JPS6436408A true JPS6436408A (en) 1989-02-07

Family

ID=16291895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62192474A Pending JPS6436408A (en) 1987-07-31 1987-07-31 Cutter for semiconductor single-crystalline bar

Country Status (1)

Country Link
JP (1) JPS6436408A (en)

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