JPS6436407A - Cutter for semiconductor single-crystalline bar - Google Patents
Cutter for semiconductor single-crystalline barInfo
- Publication number
- JPS6436407A JPS6436407A JP62192473A JP19247387A JPS6436407A JP S6436407 A JPS6436407 A JP S6436407A JP 62192473 A JP62192473 A JP 62192473A JP 19247387 A JP19247387 A JP 19247387A JP S6436407 A JPS6436407 A JP S6436407A
- Authority
- JP
- Japan
- Prior art keywords
- blade
- distance
- distance sensor
- sensor
- deviation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D47/00—Sawing machines or sawing devices working with circular saw blades, characterised only by constructional features of particular parts
- B23D47/005—Vibration-damping
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
PURPOSE:To display a deviation of an inner circumferential blade from a reference position, by detecting a distance between the inner circumferential blade and a distance sensor by the distance sensor facing upon the inner circumferential blade. CONSTITUTION:After a blade 1 has been placed in movement by setting up a single-crystalline bar W at a predetermined cutting position, a control signal of starting of cutting is applied to an input interface 12. On the one hand, a distance sensor 2 detects continuously a distance between the same and a blade 1 facing upon the same and puts out an analog detected signal. The analog signal includes a facial deviation of a blade 1, a warp, a ripple ingredient of a power source noise and a noise. The detected distance between the blade 1 and distance sensor 2 is divided into five stages by a sensor amplifier 3 and sensor position detecting part 4 and decides that in which part of an allowable range of a deviation in five stages a fixed position of a distance sensor 2 which is regarded as a reference position of the blade 1 exists.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62192473A JPS6436407A (en) | 1987-07-31 | 1987-07-31 | Cutter for semiconductor single-crystalline bar |
US07/223,802 US4971021A (en) | 1987-07-31 | 1988-07-25 | Apparatus for cutting semiconductor crystal |
IT2152288A IT1226469B (en) | 1987-07-31 | 1988-07-27 | APPARATUS TO CUT SEMICONDUCTOR CRYSTAL |
KR1019880009648A KR940011179B1 (en) | 1987-07-31 | 1988-07-29 | Apparatus for cutting semiconductor crystal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62192473A JPS6436407A (en) | 1987-07-31 | 1987-07-31 | Cutter for semiconductor single-crystalline bar |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6436407A true JPS6436407A (en) | 1989-02-07 |
Family
ID=16291878
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62192473A Pending JPS6436407A (en) | 1987-07-31 | 1987-07-31 | Cutter for semiconductor single-crystalline bar |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6436407A (en) |
-
1987
- 1987-07-31 JP JP62192473A patent/JPS6436407A/en active Pending
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