JPS6435303A - Method and instrument for measurement of displacement - Google Patents
Method and instrument for measurement of displacementInfo
- Publication number
- JPS6435303A JPS6435303A JP19234487A JP19234487A JPS6435303A JP S6435303 A JPS6435303 A JP S6435303A JP 19234487 A JP19234487 A JP 19234487A JP 19234487 A JP19234487 A JP 19234487A JP S6435303 A JPS6435303 A JP S6435303A
- Authority
- JP
- Japan
- Prior art keywords
- lambda
- phase difference
- period
- displacement
- beams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
PURPOSE:To improve resolution and also identify a moving direction by dividing an interference beam generated by a Twymann Green type interferometer into three, and giving the respective interference beams a constant phase difference and processing them. CONSTITUTION:The composite beam of a measurement beam (m) and a reference beam (r) is transmitted through lambda/4-phase plates 9-1, 9-2, and 9-3 to become two circular polarized beams which rotate in mutually opposite directions. The two beams, however, vary in mutual phase difference by the movement and displacement of a moving part, the plane of polarization of the vector composite beam rotates according to the variation in phase difference, and the displacement of the moving part makes one turn at intervals of lambda/2. This rotating beam is split into three, which are passed through linear analyzers 10-1, 10-2, and 10-3 to generate interference fringe signals which differ in phase by pi/2 each, and a sine wave signal and a cosine wave signal which have a lambda/2 period are obtained by differential arithmetic and lambda/2-period differential period among said interference fringe signals.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19234487A JPS6435303A (en) | 1987-07-31 | 1987-07-31 | Method and instrument for measurement of displacement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19234487A JPS6435303A (en) | 1987-07-31 | 1987-07-31 | Method and instrument for measurement of displacement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6435303A true JPS6435303A (en) | 1989-02-06 |
Family
ID=16289713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19234487A Pending JPS6435303A (en) | 1987-07-31 | 1987-07-31 | Method and instrument for measurement of displacement |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6435303A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH052030A (en) * | 1991-06-25 | 1993-01-08 | Iwatsu Electric Co Ltd | Digital storage oscilloscope |
| JP2007278530A (en) * | 2006-04-03 | 2007-10-25 | Matsushita Electric Ind Co Ltd | High-frequency heating device |
| JP2009526978A (en) * | 2006-02-18 | 2009-07-23 | カール マール ホールディング ゲーエムベーハー | Optical surface sensor |
| CN105043244A (en) * | 2015-05-29 | 2015-11-11 | 北方民族大学 | Contrast type anti-interference micro-motion corner reflector laser interferometer, calibration method and measurement method |
| CN105043241A (en) * | 2015-05-29 | 2015-11-11 | 北方民族大学 | Contrast type anti-interference corner reflector laser interferometer, calibration method and measurement method |
-
1987
- 1987-07-31 JP JP19234487A patent/JPS6435303A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH052030A (en) * | 1991-06-25 | 1993-01-08 | Iwatsu Electric Co Ltd | Digital storage oscilloscope |
| JP2009526978A (en) * | 2006-02-18 | 2009-07-23 | カール マール ホールディング ゲーエムベーハー | Optical surface sensor |
| JP2007278530A (en) * | 2006-04-03 | 2007-10-25 | Matsushita Electric Ind Co Ltd | High-frequency heating device |
| CN105043244A (en) * | 2015-05-29 | 2015-11-11 | 北方民族大学 | Contrast type anti-interference micro-motion corner reflector laser interferometer, calibration method and measurement method |
| CN105043241A (en) * | 2015-05-29 | 2015-11-11 | 北方民族大学 | Contrast type anti-interference corner reflector laser interferometer, calibration method and measurement method |
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