JPS6433974A - Amorphous silicon photodiode and its manufacture - Google Patents
Amorphous silicon photodiode and its manufactureInfo
- Publication number
- JPS6433974A JPS6433974A JP62190651A JP19065187A JPS6433974A JP S6433974 A JPS6433974 A JP S6433974A JP 62190651 A JP62190651 A JP 62190651A JP 19065187 A JP19065187 A JP 19065187A JP S6433974 A JPS6433974 A JP S6433974A
- Authority
- JP
- Japan
- Prior art keywords
- film
- amorphous silicon
- ito
- containing nitrogen
- stuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Light Receiving Elements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62190651A JPS6433974A (en) | 1987-07-29 | 1987-07-29 | Amorphous silicon photodiode and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62190651A JPS6433974A (en) | 1987-07-29 | 1987-07-29 | Amorphous silicon photodiode and its manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6433974A true JPS6433974A (en) | 1989-02-03 |
Family
ID=16261634
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62190651A Pending JPS6433974A (en) | 1987-07-29 | 1987-07-29 | Amorphous silicon photodiode and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6433974A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0534425A3 (en) * | 1991-09-25 | 1993-12-29 | Canon Kk | Photovoltaic device |
JP2010225735A (ja) * | 2009-03-23 | 2010-10-07 | Mitsubishi Electric Corp | フォトセンサー及びその製造方法 |
-
1987
- 1987-07-29 JP JP62190651A patent/JPS6433974A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0534425A3 (en) * | 1991-09-25 | 1993-12-29 | Canon Kk | Photovoltaic device |
JP2010225735A (ja) * | 2009-03-23 | 2010-10-07 | Mitsubishi Electric Corp | フォトセンサー及びその製造方法 |
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