JPS6433946A - Circuit board having low dielectric constant - Google Patents
Circuit board having low dielectric constantInfo
- Publication number
- JPS6433946A JPS6433946A JP18872987A JP18872987A JPS6433946A JP S6433946 A JPS6433946 A JP S6433946A JP 18872987 A JP18872987 A JP 18872987A JP 18872987 A JP18872987 A JP 18872987A JP S6433946 A JPS6433946 A JP S6433946A
- Authority
- JP
- Japan
- Prior art keywords
- fluoride resin
- circuit board
- dielectric constant
- porous glass
- low dielectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 abstract 4
- 239000005373 porous glass Substances 0.000 abstract 4
- 239000011347 resin Substances 0.000 abstract 4
- 229920005989 resin Polymers 0.000 abstract 4
- 239000002131 composite material Substances 0.000 abstract 3
- 238000000465 moulding Methods 0.000 abstract 2
- 239000011230 binding agent Substances 0.000 abstract 1
- 239000005388 borosilicate glass Substances 0.000 abstract 1
- 238000005266 casting Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- 239000011368 organic material Substances 0.000 abstract 1
- 239000000088 plastic resin Substances 0.000 abstract 1
- 239000000843 powder Substances 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 238000005245 sintering Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Abstract
PURPOSE:To obtain a circuit board, whose dielectric constant is made very low, for mounting high speed semiconductor elements and the like, by filling a porous glass structure with fluoride resin, and using a composite structure. CONSTITUTION:A porous glass structure 1 is filled with 4 fluoride resin 2,, and a composite structure is provided. For example, powder of borosilicate glass is crushed minutely, and the grain size is adjusted. Thereafter, plastic resin for forming a porous body is mixed. A binder is added thereto. Press molding is performed under the condition of 30kg/cm<2>. Then, a heating and baking step for decomposing and removing organic material is performed. Thereafter, sintering is performed at a temperature of 900 deg.C. When the molding is performed by laminating green sheets, which are formed by casting, the press conditions are made as follows: 110 deg.C and 20kg/cm<2>. Then the heated and fused fluoride resin is injected into the obtained porous glass by pressure reduction or application. Thus, a circuit board having low dielectric constant comprising the composite body of the porous glass structure 1 and the fluoride resin 2 is obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18872987A JPS6433946A (en) | 1987-07-30 | 1987-07-30 | Circuit board having low dielectric constant |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18872987A JPS6433946A (en) | 1987-07-30 | 1987-07-30 | Circuit board having low dielectric constant |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6433946A true JPS6433946A (en) | 1989-02-03 |
Family
ID=16228756
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18872987A Pending JPS6433946A (en) | 1987-07-30 | 1987-07-30 | Circuit board having low dielectric constant |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6433946A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03159188A (en) * | 1989-11-16 | 1991-07-09 | Toshiba Chem Corp | Board for printed circuit |
US6800360B2 (en) | 2001-02-08 | 2004-10-05 | Sumitomo Electric Industries, Ltd. | Porous ceramics and method of preparing the same as well as microstrip substrate |
JP2006100472A (en) * | 2004-09-29 | 2006-04-13 | Rohm Co Ltd | Semiconductor light emitting device |
-
1987
- 1987-07-30 JP JP18872987A patent/JPS6433946A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03159188A (en) * | 1989-11-16 | 1991-07-09 | Toshiba Chem Corp | Board for printed circuit |
US6800360B2 (en) | 2001-02-08 | 2004-10-05 | Sumitomo Electric Industries, Ltd. | Porous ceramics and method of preparing the same as well as microstrip substrate |
JP2006100472A (en) * | 2004-09-29 | 2006-04-13 | Rohm Co Ltd | Semiconductor light emitting device |
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