JPS6433930A - Spinner type photoresist developing method - Google Patents

Spinner type photoresist developing method

Info

Publication number
JPS6433930A
JPS6433930A JP19093587A JP19093587A JPS6433930A JP S6433930 A JPS6433930 A JP S6433930A JP 19093587 A JP19093587 A JP 19093587A JP 19093587 A JP19093587 A JP 19093587A JP S6433930 A JPS6433930 A JP S6433930A
Authority
JP
Japan
Prior art keywords
waste liquid
acceptor
wafer
turntable
washing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19093587A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0253940B2 (cs
Inventor
Tsutomu Minagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanken Electric Co Ltd
Original Assignee
Sanken Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanken Electric Co Ltd filed Critical Sanken Electric Co Ltd
Priority to JP19093587A priority Critical patent/JPS6433930A/ja
Publication of JPS6433930A publication Critical patent/JPS6433930A/ja
Publication of JPH0253940B2 publication Critical patent/JPH0253940B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP19093587A 1987-07-29 1987-07-29 Spinner type photoresist developing method Granted JPS6433930A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19093587A JPS6433930A (en) 1987-07-29 1987-07-29 Spinner type photoresist developing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19093587A JPS6433930A (en) 1987-07-29 1987-07-29 Spinner type photoresist developing method

Publications (2)

Publication Number Publication Date
JPS6433930A true JPS6433930A (en) 1989-02-03
JPH0253940B2 JPH0253940B2 (cs) 1990-11-20

Family

ID=16266132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19093587A Granted JPS6433930A (en) 1987-07-29 1987-07-29 Spinner type photoresist developing method

Country Status (1)

Country Link
JP (1) JPS6433930A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05144723A (ja) * 1991-11-20 1993-06-11 Fujitsu Ltd 現像方法
WO2012004976A1 (ja) * 2010-07-09 2012-01-12 住友ベークライト株式会社 硬化膜形成方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6151732U (cs) * 1984-09-10 1986-04-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6151732U (cs) * 1984-09-10 1986-04-07

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05144723A (ja) * 1991-11-20 1993-06-11 Fujitsu Ltd 現像方法
WO2012004976A1 (ja) * 2010-07-09 2012-01-12 住友ベークライト株式会社 硬化膜形成方法

Also Published As

Publication number Publication date
JPH0253940B2 (cs) 1990-11-20

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees