JPS6433838A - Surface analyzer - Google Patents

Abstract

PURPOSE:To detect what position of a sample is hit by a proton beam by providing a two-dimensional position detector movable on a position shielding the incident proton beam and a position for retreat in a ultrahigh-vacuum chamber and determining the correct position of the proton beam immediately before being irradiated to the sample. CONSTITUTION:A position detector 11 is provided in front of a sample, and the position detector 11 can be moved to a position A directly before the sample and a position B avoiding a proton beam. When the position detector 11 is located at the position A, it investigates the incident position LAMBDA of the proton beam. When the proton beam comes in, this incident position LAMBDA (x, y) is determined by the output of the position detector 11, thus the shift quantity of a manipulator 7 in relation to the two-dimensional detector 11 at the position A is determined to correctly position the sample, thus the center of the proton beam can be determined.