JPS643373A - Pressure difference sealing device - Google Patents

Pressure difference sealing device

Info

Publication number
JPS643373A
JPS643373A JP15645787A JP15645787A JPS643373A JP S643373 A JPS643373 A JP S643373A JP 15645787 A JP15645787 A JP 15645787A JP 15645787 A JP15645787 A JP 15645787A JP S643373 A JPS643373 A JP S643373A
Authority
JP
Japan
Prior art keywords
long
pressure difference
size thin
sealing
guide roller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15645787A
Other languages
English (en)
Other versions
JPH0353512B2 (ja
Inventor
Masao Iguchi
Isao Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Ulvac Inc
Original Assignee
Ulvac Inc
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Kawasaki Steel Corp filed Critical Ulvac Inc
Priority to JP15645787A priority Critical patent/JPS643373A/ja
Priority to DE19883851087 priority patent/DE3851087T2/de
Priority to EP19880107959 priority patent/EP0291952B1/en
Publication of JPS643373A publication Critical patent/JPS643373A/ja
Priority to US07/590,503 priority patent/US5192585A/en
Publication of JPH0353512B2 publication Critical patent/JPH0353512B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sealing Devices (AREA)
  • Physical Vapour Deposition (AREA)
JP15645787A 1987-05-20 1987-06-25 Pressure difference sealing device Granted JPS643373A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP15645787A JPS643373A (en) 1987-06-25 1987-06-25 Pressure difference sealing device
DE19883851087 DE3851087T2 (de) 1987-05-20 1988-05-18 Differentialdruck-Dichtungsapparatur und Verfahren.
EP19880107959 EP0291952B1 (en) 1987-05-20 1988-05-18 Differential pressure sealing apparatus and method
US07/590,503 US5192585A (en) 1987-05-20 1990-09-26 Differential pressure sealing apparatus and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15645787A JPS643373A (en) 1987-06-25 1987-06-25 Pressure difference sealing device

Publications (2)

Publication Number Publication Date
JPS643373A true JPS643373A (en) 1989-01-09
JPH0353512B2 JPH0353512B2 (ja) 1991-08-15

Family

ID=15628168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15645787A Granted JPS643373A (en) 1987-05-20 1987-06-25 Pressure difference sealing device

Country Status (1)

Country Link
JP (1) JPS643373A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4612477B2 (ja) * 2005-02-14 2011-01-12 日本電信電話株式会社 パターン認識装置、パターン認識方法、パターン認識プログラム、及びパターン認識プログラムの記録媒体

Also Published As

Publication number Publication date
JPH0353512B2 (ja) 1991-08-15

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