JPS6431489A - Laser gas exchanger for laser oscillator - Google Patents

Laser gas exchanger for laser oscillator

Info

Publication number
JPS6431489A
JPS6431489A JP18672987A JP18672987A JPS6431489A JP S6431489 A JPS6431489 A JP S6431489A JP 18672987 A JP18672987 A JP 18672987A JP 18672987 A JP18672987 A JP 18672987A JP S6431489 A JPS6431489 A JP S6431489A
Authority
JP
Japan
Prior art keywords
pressure
laser
laser oscillator
controller
solenoid valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18672987A
Other languages
Japanese (ja)
Inventor
Kenji Kumamoto
Noriaki Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP18672987A priority Critical patent/JPS6431489A/en
Publication of JPS6431489A publication Critical patent/JPS6431489A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To simplify piping and to reduce the laser gas feed time by controlling a solenoid valve which is linked with a feed bomb in accordance with the command from a controller, by keeping the amount of laser gas discharged from a laser oscillator constant and by detecting pressure reduction of laser gas in the laser oscillator using a pressure detector linked with a controller. CONSTITUTION:Fed laser gas is introduced into a laser oscillator 2 from a feed bomb 5 through a solenoid valve 14 and dissociated (deteriorated) laser gas in the laser oscillator 2 is constantly vacuumized by a vacuum pump 11a through a flow rate valve 13 to be kept at a definite pressure. When the pressure in the laser oscillator 2 which is detected by a pressure detector 9 becomes higher than the set pressure, this information is sent from the pressure detector 9 to a controller 15 and the solenoid valve 14 is closed in accordance with the command from the controller 15. When the pressure in the laser oscillator 2 becomes lower than the set pressure, the solenoid valve 14 is opened in accordance with the command from the controller 15. The pressure in the laser oscillator 2 is thereby maintained at the set pressure.
JP18672987A 1987-07-28 1987-07-28 Laser gas exchanger for laser oscillator Pending JPS6431489A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18672987A JPS6431489A (en) 1987-07-28 1987-07-28 Laser gas exchanger for laser oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18672987A JPS6431489A (en) 1987-07-28 1987-07-28 Laser gas exchanger for laser oscillator

Publications (1)

Publication Number Publication Date
JPS6431489A true JPS6431489A (en) 1989-02-01

Family

ID=16193616

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18672987A Pending JPS6431489A (en) 1987-07-28 1987-07-28 Laser gas exchanger for laser oscillator

Country Status (1)

Country Link
JP (1) JPS6431489A (en)

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