JPS6431422A - Method of controlling plasma density - Google Patents
Method of controlling plasma densityInfo
- Publication number
- JPS6431422A JPS6431422A JP18847887A JP18847887A JPS6431422A JP S6431422 A JPS6431422 A JP S6431422A JP 18847887 A JP18847887 A JP 18847887A JP 18847887 A JP18847887 A JP 18847887A JP S6431422 A JPS6431422 A JP S6431422A
- Authority
- JP
- Japan
- Prior art keywords
- probe
- plasma
- voltage
- density
- sticks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To measure the density of plasma at great speed, with high accuracy and obtain plasma that is always constant by removing a film which sticks to a probe prior to measurement of the density of plasma. CONSTITUTION:Heat treatment circuit 26 connecting to a probe 21 allows a heating current to flow into the probe 21 itself (through conductors 42a and 42b) and establishes a state of high temperature and then a film which sticks to the W-wire 46 surface of the probe 21 is removed. Next, the probe 21 is inserted into a plasma atmosphere. Then the probe voltage is impressed. The probe current corresponding to this voltage is converted into a voltage after its RF current composition is eliminated and its voltage is stored in a digital memory together with the probe voltage through an arithmetic circuit 35. Probe characteristics are inputted into a microcomputer through an interface (GP-IB) and the density of plasma and the like are obtained. As signals are sent to a plasma control circuit 37 by the value of density and the like and gas pressure or an RF electric power source 15 is controlled, plasma that is always constant is obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62188478A JPH0828346B2 (en) | 1987-07-28 | 1987-07-28 | Plasma density control method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62188478A JPH0828346B2 (en) | 1987-07-28 | 1987-07-28 | Plasma density control method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6431422A true JPS6431422A (en) | 1989-02-01 |
JPH0828346B2 JPH0828346B2 (en) | 1996-03-21 |
Family
ID=16224430
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62188478A Expired - Lifetime JPH0828346B2 (en) | 1987-07-28 | 1987-07-28 | Plasma density control method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0828346B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5211061A (en) * | 1991-07-16 | 1993-05-18 | Goodwin Jerry J | Bolt clamping force sensor and clamping force validation method |
EP0598128A1 (en) * | 1991-08-05 | 1994-05-25 | OHMI, Tadahiro | Plasma processing apparatus |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58171821A (en) * | 1982-03-31 | 1983-10-08 | Matsushita Electric Ind Co Ltd | Detection of contamination and purification degree in plasma processing and apparatus thereof |
-
1987
- 1987-07-28 JP JP62188478A patent/JPH0828346B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58171821A (en) * | 1982-03-31 | 1983-10-08 | Matsushita Electric Ind Co Ltd | Detection of contamination and purification degree in plasma processing and apparatus thereof |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5211061A (en) * | 1991-07-16 | 1993-05-18 | Goodwin Jerry J | Bolt clamping force sensor and clamping force validation method |
EP0598128A1 (en) * | 1991-08-05 | 1994-05-25 | OHMI, Tadahiro | Plasma processing apparatus |
EP0598128A4 (en) * | 1991-08-05 | 1995-05-17 | Tadahiro Ohmi | Plasma processing apparatus. |
Also Published As
Publication number | Publication date |
---|---|
JPH0828346B2 (en) | 1996-03-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080321 Year of fee payment: 12 |