JPS6431412A - Formation of ohmic contact electrode layer and device therefor - Google Patents
Formation of ohmic contact electrode layer and device thereforInfo
- Publication number
- JPS6431412A JPS6431412A JP18744187A JP18744187A JPS6431412A JP S6431412 A JPS6431412 A JP S6431412A JP 18744187 A JP18744187 A JP 18744187A JP 18744187 A JP18744187 A JP 18744187A JP S6431412 A JPS6431412 A JP S6431412A
- Authority
- JP
- Japan
- Prior art keywords
- contact
- semiconductor substrate
- heating body
- metallic layer
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To reduce contact resistance between a metallic layer and a semiconductor substrate as well as the distribution unevenness of the contact resistance, by causing a semiconductor substrate, which is contact-placed on a heating body and to which a metallic layer is attached, to be vacuum-attracted to the heating body side. CONSTITUTION:A semiconductor substrate 6 to which a metallic layer to form an ohmic contact electrode layer is attached is contact-placed on a placing place 12 of a heating body 11 with cylindrical rollers 26 from the upper position or from the position at a distance from the heating body 11. The cylindrical rollers 26 are received in striped grooves 27 of the heating body 11 and the semiconductor substrate 6 covers large number of inlet ports 29. Further, its substrate 6 is attracted by the placing plane 12 side of the heating body 11 through large number of the inlet ports 29 with the operation of a suction air pump 32 and is placed after coming closely into contact with the placing place 12 without having contact distribution unevenness very much. Under this state, the semiconductor substrate 6 is treated by heat. Then it can be heated at the prescribed temperature without having temperature distribution unevenness very much. As a result, contact-resistance can be lessened without having the distribution unevenness of contact-resistance very much between the metallic layer and the semiconductor substrate 6.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18744187A JP2579490B2 (en) | 1987-07-27 | 1987-07-27 | Method for forming ohmic contact electrode layer and apparatus used therefor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18744187A JP2579490B2 (en) | 1987-07-27 | 1987-07-27 | Method for forming ohmic contact electrode layer and apparatus used therefor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6431412A true JPS6431412A (en) | 1989-02-01 |
JP2579490B2 JP2579490B2 (en) | 1997-02-05 |
Family
ID=16206117
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18744187A Expired - Lifetime JP2579490B2 (en) | 1987-07-27 | 1987-07-27 | Method for forming ohmic contact electrode layer and apparatus used therefor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2579490B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05267309A (en) * | 1992-03-19 | 1993-10-15 | Ngk Insulators Ltd | Heating apparatus |
US5923427A (en) * | 1997-07-10 | 1999-07-13 | Banner Engineering Corporation | Optical triangulation distance sensing system and method using a position sensitive detector and an automatic power controlled light source |
US6122039A (en) * | 1998-10-28 | 2000-09-19 | Banner Engineering Corp. | Method and apparatus to detect and report object displacement utilizing optical triangulation principles |
-
1987
- 1987-07-27 JP JP18744187A patent/JP2579490B2/en not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05267309A (en) * | 1992-03-19 | 1993-10-15 | Ngk Insulators Ltd | Heating apparatus |
US5923427A (en) * | 1997-07-10 | 1999-07-13 | Banner Engineering Corporation | Optical triangulation distance sensing system and method using a position sensitive detector and an automatic power controlled light source |
US6122039A (en) * | 1998-10-28 | 2000-09-19 | Banner Engineering Corp. | Method and apparatus to detect and report object displacement utilizing optical triangulation principles |
Also Published As
Publication number | Publication date |
---|---|
JP2579490B2 (en) | 1997-02-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 11 Free format text: PAYMENT UNTIL: 20071107 |