JPS6431003A - Probe for scanning-type tunnel microscope and manufacture thereof - Google Patents
Probe for scanning-type tunnel microscope and manufacture thereofInfo
- Publication number
- JPS6431003A JPS6431003A JP18668587A JP18668587A JPS6431003A JP S6431003 A JPS6431003 A JP S6431003A JP 18668587 A JP18668587 A JP 18668587A JP 18668587 A JP18668587 A JP 18668587A JP S6431003 A JPS6431003 A JP S6431003A
- Authority
- JP
- Japan
- Prior art keywords
- projection
- super
- particulate
- probe
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
PURPOSE:To obtain a probe having a point comprising several atoms or less, to secure the reliability and reproducibility thereof and to improve the easiness in a manufacturing process, by providing metal super-particulates at the point. CONSTITUTION:A probe employed for a scanning-type tunnel microscope is constructed by providing a minute projection 11 on a low-resistance Si substrate 10 and by bonding a metal super-particulate 13 to the projection by using a conductive adhesive 12. In more detail, the minute projection 11 measuring about 0.2mum in the three dimensions is formed on the low-resistance Si substrate 10 by an etching process technique of LSI. After the heat-resistant conductive adhesive 12 is applied on the projection 11, subsequently, the substrate 10 is put on a sampling rod 16 and inserted into a super-particulate generating furnace 17, and the metal super-particulate 13 is made to adhere to the projection 11 therein. Since the projection 11 has substantially the same size with that of the super-particulate 13, on the occasion, the probe having only one super- particulate adhering to the projection can be manufactured with an excellent yield.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18668587A JPS6431003A (en) | 1987-07-28 | 1987-07-28 | Probe for scanning-type tunnel microscope and manufacture thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18668587A JPS6431003A (en) | 1987-07-28 | 1987-07-28 | Probe for scanning-type tunnel microscope and manufacture thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6431003A true JPS6431003A (en) | 1989-02-01 |
Family
ID=16192847
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18668587A Pending JPS6431003A (en) | 1987-07-28 | 1987-07-28 | Probe for scanning-type tunnel microscope and manufacture thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6431003A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06305898A (en) * | 1993-03-10 | 1994-11-01 | Internatl Business Mach Corp <Ibm> | Single crystal tip structure and its formation |
DE102012102762A1 (en) | 2011-04-01 | 2012-10-04 | Johnson Electric S.A. | electric motor |
-
1987
- 1987-07-28 JP JP18668587A patent/JPS6431003A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06305898A (en) * | 1993-03-10 | 1994-11-01 | Internatl Business Mach Corp <Ibm> | Single crystal tip structure and its formation |
DE102012102762A1 (en) | 2011-04-01 | 2012-10-04 | Johnson Electric S.A. | electric motor |
DE102012102764A1 (en) | 2011-04-01 | 2012-10-04 | Johnson Electric S.A. | electric motor |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS51131274A (en) | Tip bonding method | |
JPS6431003A (en) | Probe for scanning-type tunnel microscope and manufacture thereof | |
JPS5231762A (en) | Method of measuring thickness and composition of thin film formed on s ubstrate | |
JPS5612602A (en) | Fiber for energy transmission | |
JPS6425553A (en) | Semiconductor device | |
JPS53102670A (en) | Lead bending method for glass ceramic package type semiconductor device | |
DE69638203D1 (en) | CONICAL STRUCTURE FOR MICROTHERMOELEMENT MICRO-ELECTRODES, FIELD EMISSIONS, AND MICROMAGNETIC SENSORS SUITABLE FOR FORCE MEASUREMENT | |
JPS54157479A (en) | Electrode terminal forming method to wiring connecting semiconductor elements | |
JPS5339873A (en) | Etching method of silicon semiconductor substrate containing gold | |
JPS5652841A (en) | Lead frame for fluorescent indicator | |
JPS649641A (en) | Manufacture of semiconductor element | |
JPS52129279A (en) | Production of semiconductor device | |
JPS5228872A (en) | Method for measuring the size of thin plane | |
JPS53124056A (en) | Manufacture of electron tube | |
JPS5257891A (en) | Production of inflammable gas detecting element | |
JPS52104869A (en) | Manufacture for semiconductor device | |
JPS5656667A (en) | Semiconductor device | |
JPS556245A (en) | Thermister bolometer | |
JPS5443465A (en) | Semiconuductor device | |
JPS5351978A (en) | Manufacture of semiconductor device | |
JPS5391578A (en) | Container for electronic part | |
JPS5372461A (en) | Etching method in manufacture of semiconductor device | |
JPS5267971A (en) | Manufacture of integrated circuit wafer | |
JPS54150974A (en) | Manufacture of semiconductor device | |
JPS6445039A (en) | Manufacture of electron tube cathode device |