JPS6431003A - Probe for scanning-type tunnel microscope and manufacture thereof - Google Patents

Probe for scanning-type tunnel microscope and manufacture thereof

Info

Publication number
JPS6431003A
JPS6431003A JP18668587A JP18668587A JPS6431003A JP S6431003 A JPS6431003 A JP S6431003A JP 18668587 A JP18668587 A JP 18668587A JP 18668587 A JP18668587 A JP 18668587A JP S6431003 A JPS6431003 A JP S6431003A
Authority
JP
Japan
Prior art keywords
projection
super
particulate
probe
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18668587A
Other languages
Japanese (ja)
Inventor
Takahiro Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP18668587A priority Critical patent/JPS6431003A/en
Publication of JPS6431003A publication Critical patent/JPS6431003A/en
Pending legal-status Critical Current

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Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

PURPOSE:To obtain a probe having a point comprising several atoms or less, to secure the reliability and reproducibility thereof and to improve the easiness in a manufacturing process, by providing metal super-particulates at the point. CONSTITUTION:A probe employed for a scanning-type tunnel microscope is constructed by providing a minute projection 11 on a low-resistance Si substrate 10 and by bonding a metal super-particulate 13 to the projection by using a conductive adhesive 12. In more detail, the minute projection 11 measuring about 0.2mum in the three dimensions is formed on the low-resistance Si substrate 10 by an etching process technique of LSI. After the heat-resistant conductive adhesive 12 is applied on the projection 11, subsequently, the substrate 10 is put on a sampling rod 16 and inserted into a super-particulate generating furnace 17, and the metal super-particulate 13 is made to adhere to the projection 11 therein. Since the projection 11 has substantially the same size with that of the super-particulate 13, on the occasion, the probe having only one super- particulate adhering to the projection can be manufactured with an excellent yield.
JP18668587A 1987-07-28 1987-07-28 Probe for scanning-type tunnel microscope and manufacture thereof Pending JPS6431003A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18668587A JPS6431003A (en) 1987-07-28 1987-07-28 Probe for scanning-type tunnel microscope and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18668587A JPS6431003A (en) 1987-07-28 1987-07-28 Probe for scanning-type tunnel microscope and manufacture thereof

Publications (1)

Publication Number Publication Date
JPS6431003A true JPS6431003A (en) 1989-02-01

Family

ID=16192847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18668587A Pending JPS6431003A (en) 1987-07-28 1987-07-28 Probe for scanning-type tunnel microscope and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS6431003A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06305898A (en) * 1993-03-10 1994-11-01 Internatl Business Mach Corp <Ibm> Single crystal tip structure and its formation
DE102012102762A1 (en) 2011-04-01 2012-10-04 Johnson Electric S.A. electric motor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06305898A (en) * 1993-03-10 1994-11-01 Internatl Business Mach Corp <Ibm> Single crystal tip structure and its formation
DE102012102762A1 (en) 2011-04-01 2012-10-04 Johnson Electric S.A. electric motor
DE102012102764A1 (en) 2011-04-01 2012-10-04 Johnson Electric S.A. electric motor

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