JPS643054Y2 - - Google Patents
Info
- Publication number
- JPS643054Y2 JPS643054Y2 JP14141182U JP14141182U JPS643054Y2 JP S643054 Y2 JPS643054 Y2 JP S643054Y2 JP 14141182 U JP14141182 U JP 14141182U JP 14141182 U JP14141182 U JP 14141182U JP S643054 Y2 JPS643054 Y2 JP S643054Y2
- Authority
- JP
- Japan
- Prior art keywords
- inert liquid
- evaporated gas
- liquefaction
- container
- recovery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 47
- 238000011084 recovery Methods 0.000 claims description 23
- 238000001816 cooling Methods 0.000 claims description 8
- 238000007599 discharging Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 25
- 239000004065 semiconductor Substances 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- RVZRBWKZFJCCIB-UHFFFAOYSA-N perfluorotributylamine Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)N(C(F)(F)C(F)(F)C(F)(F)C(F)(F)F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F RVZRBWKZFJCCIB-UHFFFAOYSA-N 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14141182U JPS5945545U (ja) | 1982-09-17 | 1982-09-17 | グロ−スリ−クチエツク機のイナ−トリキツド回収装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14141182U JPS5945545U (ja) | 1982-09-17 | 1982-09-17 | グロ−スリ−クチエツク機のイナ−トリキツド回収装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5945545U JPS5945545U (ja) | 1984-03-26 |
| JPS643054Y2 true JPS643054Y2 (enExample) | 1989-01-26 |
Family
ID=30316284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14141182U Granted JPS5945545U (ja) | 1982-09-17 | 1982-09-17 | グロ−スリ−クチエツク機のイナ−トリキツド回収装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5945545U (enExample) |
-
1982
- 1982-09-17 JP JP14141182U patent/JPS5945545U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5945545U (ja) | 1984-03-26 |
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