JPS5945545U - グロ−スリ−クチエツク機のイナ−トリキツド回収装置 - Google Patents

グロ−スリ−クチエツク機のイナ−トリキツド回収装置

Info

Publication number
JPS5945545U
JPS5945545U JP14141182U JP14141182U JPS5945545U JP S5945545 U JPS5945545 U JP S5945545U JP 14141182 U JP14141182 U JP 14141182U JP 14141182 U JP14141182 U JP 14141182U JP S5945545 U JPS5945545 U JP S5945545U
Authority
JP
Japan
Prior art keywords
check machine
inert liquid
dehumidifier
liquid recovery
recovery device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14141182U
Other languages
English (en)
Japanese (ja)
Other versions
JPS643054Y2 (enExample
Inventor
大野　利雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14141182U priority Critical patent/JPS5945545U/ja
Publication of JPS5945545U publication Critical patent/JPS5945545U/ja
Application granted granted Critical
Publication of JPS643054Y2 publication Critical patent/JPS643054Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP14141182U 1982-09-17 1982-09-17 グロ−スリ−クチエツク機のイナ−トリキツド回収装置 Granted JPS5945545U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14141182U JPS5945545U (ja) 1982-09-17 1982-09-17 グロ−スリ−クチエツク機のイナ−トリキツド回収装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14141182U JPS5945545U (ja) 1982-09-17 1982-09-17 グロ−スリ−クチエツク機のイナ−トリキツド回収装置

Publications (2)

Publication Number Publication Date
JPS5945545U true JPS5945545U (ja) 1984-03-26
JPS643054Y2 JPS643054Y2 (enExample) 1989-01-26

Family

ID=30316284

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14141182U Granted JPS5945545U (ja) 1982-09-17 1982-09-17 グロ−スリ−クチエツク機のイナ−トリキツド回収装置

Country Status (1)

Country Link
JP (1) JPS5945545U (enExample)

Also Published As

Publication number Publication date
JPS643054Y2 (enExample) 1989-01-26

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