JPS6429894U - - Google Patents

Info

Publication number
JPS6429894U
JPS6429894U JP12498387U JP12498387U JPS6429894U JP S6429894 U JPS6429894 U JP S6429894U JP 12498387 U JP12498387 U JP 12498387U JP 12498387 U JP12498387 U JP 12498387U JP S6429894 U JPS6429894 U JP S6429894U
Authority
JP
Japan
Prior art keywords
electronic
electronic device
gas
substrates
gas header
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12498387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12498387U priority Critical patent/JPS6429894U/ja
Publication of JPS6429894U publication Critical patent/JPS6429894U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Rolls And Other Rotary Bodies (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
JP12498387U 1987-08-17 1987-08-17 Pending JPS6429894U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12498387U JPS6429894U (enrdf_load_stackoverflow) 1987-08-17 1987-08-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12498387U JPS6429894U (enrdf_load_stackoverflow) 1987-08-17 1987-08-17

Publications (1)

Publication Number Publication Date
JPS6429894U true JPS6429894U (enrdf_load_stackoverflow) 1989-02-22

Family

ID=31375185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12498387U Pending JPS6429894U (enrdf_load_stackoverflow) 1987-08-17 1987-08-17

Country Status (1)

Country Link
JP (1) JPS6429894U (enrdf_load_stackoverflow)

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