JPS6429780A - Optical semiconductor measuring instrument - Google Patents
Optical semiconductor measuring instrumentInfo
- Publication number
- JPS6429780A JPS6429780A JP18505487A JP18505487A JPS6429780A JP S6429780 A JPS6429780 A JP S6429780A JP 18505487 A JP18505487 A JP 18505487A JP 18505487 A JP18505487 A JP 18505487A JP S6429780 A JPS6429780 A JP S6429780A
- Authority
- JP
- Japan
- Prior art keywords
- light receiving
- stopped
- laser light
- optical
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
PURPOSE:To execute with high accuracy a measurement of the multiplication factor and a measurement of the quantum efficiency by stopping down a laser light and radiating it to only a light receiving part of an optical semiconductor element. CONSTITUTION:A light beam of prescribed wavelength emitted from a laser light source 2 is led by optical fiber cables 3, 5, and a laser light is attenuated through an optical attenuator 4, and thereafter, stopped down to almost the same diameter as the core diameter of the optical fiber cable by a collimating objective lens 6 and a condensing objective lens 7, and radiated to a semiconductor element to be measured 8. The element 8 is moved in three axial directions on orthogonal coordinates by stages 9, 10 and 11 and a pulse motor driver part 15. Subsequently, an optical axis alignment control part 14 measures light receiving power at the time when a photodetector is moved in orthogonal two axis XY directions, calculates the center of a light receiving part in a pellet of the element 8 from a relation of its position and the light receiving power, and also, estimates a stopped-down position of the laser light from the light receiving power at the time when said light receiving power is moved in the Z axis direction. In such a way, the stopped-down laser light is radiated to only the light receiving part, and the light quantity of the stopped-down vicinity is measured by a optical power meter, therefore, the measurement can be executed with high accuracy.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62185054A JP2546277B2 (en) | 1987-07-24 | 1987-07-24 | Optical semiconductor measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62185054A JP2546277B2 (en) | 1987-07-24 | 1987-07-24 | Optical semiconductor measuring device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6429780A true JPS6429780A (en) | 1989-01-31 |
JP2546277B2 JP2546277B2 (en) | 1996-10-23 |
Family
ID=16163996
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62185054A Expired - Lifetime JP2546277B2 (en) | 1987-07-24 | 1987-07-24 | Optical semiconductor measuring device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2546277B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03269335A (en) * | 1990-03-20 | 1991-11-29 | Mitsubishi Electric Corp | Lamp emitting type light source |
JP2008032549A (en) * | 2006-07-28 | 2008-02-14 | Eko Instruments Trading Co Ltd | Optical adjustment apparatus, light source device, and system for measuring characteristic of solar cell |
CN114112314A (en) * | 2021-12-21 | 2022-03-01 | 天津大学 | Detection performance test method for multifunctional photoelectric detection system |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5396680A (en) * | 1977-02-02 | 1978-08-24 | Mitsubishi Electric Corp | Photo element measuring instrument |
JPS60114976U (en) * | 1984-01-13 | 1985-08-03 | 日本電気株式会社 | Optical semiconductor device inspection equipment |
JPS61177469U (en) * | 1985-04-24 | 1986-11-05 | ||
JPS6222004A (en) * | 1985-07-22 | 1987-01-30 | Toshiba Corp | Detecting method for optical axis position |
-
1987
- 1987-07-24 JP JP62185054A patent/JP2546277B2/en not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5396680A (en) * | 1977-02-02 | 1978-08-24 | Mitsubishi Electric Corp | Photo element measuring instrument |
JPS60114976U (en) * | 1984-01-13 | 1985-08-03 | 日本電気株式会社 | Optical semiconductor device inspection equipment |
JPS61177469U (en) * | 1985-04-24 | 1986-11-05 | ||
JPS6222004A (en) * | 1985-07-22 | 1987-01-30 | Toshiba Corp | Detecting method for optical axis position |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03269335A (en) * | 1990-03-20 | 1991-11-29 | Mitsubishi Electric Corp | Lamp emitting type light source |
JP2008032549A (en) * | 2006-07-28 | 2008-02-14 | Eko Instruments Trading Co Ltd | Optical adjustment apparatus, light source device, and system for measuring characteristic of solar cell |
CN114112314A (en) * | 2021-12-21 | 2022-03-01 | 天津大学 | Detection performance test method for multifunctional photoelectric detection system |
Also Published As
Publication number | Publication date |
---|---|
JP2546277B2 (en) | 1996-10-23 |
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Legal Events
Date | Code | Title | Description |
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R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
EXPY | Cancellation because of completion of term |