JPS6429290U - - Google Patents
Info
- Publication number
- JPS6429290U JPS6429290U JP12397487U JP12397487U JPS6429290U JP S6429290 U JPS6429290 U JP S6429290U JP 12397487 U JP12397487 U JP 12397487U JP 12397487 U JP12397487 U JP 12397487U JP S6429290 U JPS6429290 U JP S6429290U
- Authority
- JP
- Japan
- Prior art keywords
- room
- housing
- turbo
- molecular pump
- evacuated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987123974U JPH0732956Y2 (ja) | 1987-08-13 | 1987-08-13 | タ−ボ分子ポンプ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987123974U JPH0732956Y2 (ja) | 1987-08-13 | 1987-08-13 | タ−ボ分子ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6429290U true JPS6429290U (sk) | 1989-02-21 |
JPH0732956Y2 JPH0732956Y2 (ja) | 1995-07-31 |
Family
ID=31373310
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987123974U Expired - Lifetime JPH0732956Y2 (ja) | 1987-08-13 | 1987-08-13 | タ−ボ分子ポンプ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0732956Y2 (sk) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5676453B2 (ja) * | 2009-08-26 | 2015-02-25 | 株式会社島津製作所 | ターボ分子ポンプおよびロータの製造方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4671624B2 (ja) * | 2004-05-25 | 2011-04-20 | エドワーズ株式会社 | 真空ポンプ |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS584323A (ja) * | 1981-06-26 | 1983-01-11 | Osaka Shinku Kiki Seisakusho:Kk | 動翼付ロ−タ−の成形法 |
-
1987
- 1987-08-13 JP JP1987123974U patent/JPH0732956Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS584323A (ja) * | 1981-06-26 | 1983-01-11 | Osaka Shinku Kiki Seisakusho:Kk | 動翼付ロ−タ−の成形法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5676453B2 (ja) * | 2009-08-26 | 2015-02-25 | 株式会社島津製作所 | ターボ分子ポンプおよびロータの製造方法 |
US10024327B2 (en) | 2009-08-26 | 2018-07-17 | Shimadzu Corporation | Turbomolecular pump, and method of manufacturing rotor |
Also Published As
Publication number | Publication date |
---|---|
JPH0732956Y2 (ja) | 1995-07-31 |