JPS6428811A - Optical cvd device - Google Patents

Optical cvd device

Info

Publication number
JPS6428811A
JPS6428811A JP18329687A JP18329687A JPS6428811A JP S6428811 A JPS6428811 A JP S6428811A JP 18329687 A JP18329687 A JP 18329687A JP 18329687 A JP18329687 A JP 18329687A JP S6428811 A JPS6428811 A JP S6428811A
Authority
JP
Japan
Prior art keywords
light
sample
reaction gas
circumference
irradiate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18329687A
Other languages
Japanese (ja)
Inventor
Hisayuki Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP18329687A priority Critical patent/JPS6428811A/en
Publication of JPS6428811A publication Critical patent/JPS6428811A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To contrive improvement in reaction efficiency of reaction gas as well as to form a film quickly by a method wherein, when light is made to irradiate on the reaction gas located on the circumference of the simple placed on a sample-placing part, a light-reflecting plate is provided in the direction where the light is projected. CONSTITUTION:A light is made to irradiate on the reaction gas located on the circumference of the sample 6 placed on a sample-placing part 5. At that time, a light-reflecting plate 7 is provided in the light irradiating direction. The whole part of the inner circumference of the reflection plate 7 is mirror finished, and the light such as a laser beam and the like can be reflected at a high reflection factor. Consequently, both of the direct light sent from a light source and the light reflected by the reflection plate 7 are projected on the circumference of the sample 6, and the area of irradiation of light is increased. As a result, the reflection factor of the reaction gas can be enhanced, and a film can be formed quickly.
JP18329687A 1987-07-24 1987-07-24 Optical cvd device Pending JPS6428811A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18329687A JPS6428811A (en) 1987-07-24 1987-07-24 Optical cvd device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18329687A JPS6428811A (en) 1987-07-24 1987-07-24 Optical cvd device

Publications (1)

Publication Number Publication Date
JPS6428811A true JPS6428811A (en) 1989-01-31

Family

ID=16133185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18329687A Pending JPS6428811A (en) 1987-07-24 1987-07-24 Optical cvd device

Country Status (1)

Country Link
JP (1) JPS6428811A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8268053B2 (en) 1996-04-26 2012-09-18 Donaldson Company, Inc. Fluted filter media

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8268053B2 (en) 1996-04-26 2012-09-18 Donaldson Company, Inc. Fluted filter media

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