JPS6428811A - Optical cvd device - Google Patents
Optical cvd deviceInfo
- Publication number
- JPS6428811A JPS6428811A JP18329687A JP18329687A JPS6428811A JP S6428811 A JPS6428811 A JP S6428811A JP 18329687 A JP18329687 A JP 18329687A JP 18329687 A JP18329687 A JP 18329687A JP S6428811 A JPS6428811 A JP S6428811A
- Authority
- JP
- Japan
- Prior art keywords
- light
- sample
- reaction gas
- circumference
- irradiate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To contrive improvement in reaction efficiency of reaction gas as well as to form a film quickly by a method wherein, when light is made to irradiate on the reaction gas located on the circumference of the simple placed on a sample-placing part, a light-reflecting plate is provided in the direction where the light is projected. CONSTITUTION:A light is made to irradiate on the reaction gas located on the circumference of the sample 6 placed on a sample-placing part 5. At that time, a light-reflecting plate 7 is provided in the light irradiating direction. The whole part of the inner circumference of the reflection plate 7 is mirror finished, and the light such as a laser beam and the like can be reflected at a high reflection factor. Consequently, both of the direct light sent from a light source and the light reflected by the reflection plate 7 are projected on the circumference of the sample 6, and the area of irradiation of light is increased. As a result, the reflection factor of the reaction gas can be enhanced, and a film can be formed quickly.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18329687A JPS6428811A (en) | 1987-07-24 | 1987-07-24 | Optical cvd device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18329687A JPS6428811A (en) | 1987-07-24 | 1987-07-24 | Optical cvd device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6428811A true JPS6428811A (en) | 1989-01-31 |
Family
ID=16133185
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18329687A Pending JPS6428811A (en) | 1987-07-24 | 1987-07-24 | Optical cvd device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6428811A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8268053B2 (en) | 1996-04-26 | 2012-09-18 | Donaldson Company, Inc. | Fluted filter media |
-
1987
- 1987-07-24 JP JP18329687A patent/JPS6428811A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8268053B2 (en) | 1996-04-26 | 2012-09-18 | Donaldson Company, Inc. | Fluted filter media |
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