JPS6426377U - - Google Patents
Info
- Publication number
- JPS6426377U JPS6426377U JP11916887U JP11916887U JPS6426377U JP S6426377 U JPS6426377 U JP S6426377U JP 11916887 U JP11916887 U JP 11916887U JP 11916887 U JP11916887 U JP 11916887U JP S6426377 U JPS6426377 U JP S6426377U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- raw material
- manufacturing apparatus
- semiconductor manufacturing
- reflecting plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11916887U JPS6426377U (en, 2012) | 1987-08-03 | 1987-08-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11916887U JPS6426377U (en, 2012) | 1987-08-03 | 1987-08-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6426377U true JPS6426377U (en, 2012) | 1989-02-14 |
Family
ID=31364166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11916887U Pending JPS6426377U (en, 2012) | 1987-08-03 | 1987-08-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6426377U (en, 2012) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02283693A (ja) * | 1989-04-26 | 1990-11-21 | Nkk Corp | シリコン単結晶の製造方法および装置 |
| WO2009081523A1 (ja) * | 2007-12-25 | 2009-07-02 | Shin-Etsu Handotai Co., Ltd. | 単結晶製造装置および製造方法 |
| JP2015199653A (ja) * | 2014-04-03 | 2015-11-12 | 環球晶圓股▲ふん▼有限公司 | 水晶の育成装置およびその保温カバー |
-
1987
- 1987-08-03 JP JP11916887U patent/JPS6426377U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02283693A (ja) * | 1989-04-26 | 1990-11-21 | Nkk Corp | シリコン単結晶の製造方法および装置 |
| WO2009081523A1 (ja) * | 2007-12-25 | 2009-07-02 | Shin-Etsu Handotai Co., Ltd. | 単結晶製造装置および製造方法 |
| JP2009155131A (ja) * | 2007-12-25 | 2009-07-16 | Shin Etsu Handotai Co Ltd | 単結晶製造装置および製造方法 |
| JP2015199653A (ja) * | 2014-04-03 | 2015-11-12 | 環球晶圓股▲ふん▼有限公司 | 水晶の育成装置およびその保温カバー |