JPH0261963U - - Google Patents
Info
- Publication number
- JPH0261963U JPH0261963U JP13879888U JP13879888U JPH0261963U JP H0261963 U JPH0261963 U JP H0261963U JP 13879888 U JP13879888 U JP 13879888U JP 13879888 U JP13879888 U JP 13879888U JP H0261963 U JPH0261963 U JP H0261963U
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- crucible
- melt
- furnace body
- crystal growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000000155 melt Substances 0.000 claims description 4
- 239000002994 raw material Substances 0.000 claims description 2
- 239000003779 heat-resistant material Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13879888U JPH0261963U (en, 2012) | 1988-10-25 | 1988-10-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13879888U JPH0261963U (en, 2012) | 1988-10-25 | 1988-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0261963U true JPH0261963U (en, 2012) | 1990-05-09 |
Family
ID=31401473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13879888U Pending JPH0261963U (en, 2012) | 1988-10-25 | 1988-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0261963U (en, 2012) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0633962U (ja) * | 1992-10-09 | 1994-05-06 | コマツ電子金属株式会社 | 半導体単結晶製造装置 |
| JP2011057467A (ja) * | 2009-09-07 | 2011-03-24 | Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 | 単結晶引上装置 |
-
1988
- 1988-10-25 JP JP13879888U patent/JPH0261963U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0633962U (ja) * | 1992-10-09 | 1994-05-06 | コマツ電子金属株式会社 | 半導体単結晶製造装置 |
| JP2011057467A (ja) * | 2009-09-07 | 2011-03-24 | Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 | 単結晶引上装置 |