JPH02146424U - - Google Patents
Info
- Publication number
- JPH02146424U JPH02146424U JP5451489U JP5451489U JPH02146424U JP H02146424 U JPH02146424 U JP H02146424U JP 5451489 U JP5451489 U JP 5451489U JP 5451489 U JP5451489 U JP 5451489U JP H02146424 U JPH02146424 U JP H02146424U
- Authority
- JP
- Japan
- Prior art keywords
- wall
- heat treatment
- gas
- heating chamber
- treatment furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 12
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5451489U JPH02146424U (en, 2012) | 1989-05-15 | 1989-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5451489U JPH02146424U (en, 2012) | 1989-05-15 | 1989-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146424U true JPH02146424U (en, 2012) | 1990-12-12 |
Family
ID=31576647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5451489U Pending JPH02146424U (en, 2012) | 1989-05-15 | 1989-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146424U (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005201547A (ja) * | 2004-01-16 | 2005-07-28 | Gac Corp | 加熱装置 |
-
1989
- 1989-05-15 JP JP5451489U patent/JPH02146424U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005201547A (ja) * | 2004-01-16 | 2005-07-28 | Gac Corp | 加熱装置 |