JPS6426374U - - Google Patents
Info
- Publication number
- JPS6426374U JPS6426374U JP11928987U JP11928987U JPS6426374U JP S6426374 U JPS6426374 U JP S6426374U JP 11928987 U JP11928987 U JP 11928987U JP 11928987 U JP11928987 U JP 11928987U JP S6426374 U JPS6426374 U JP S6426374U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum container
- panel heater
- vacuum
- reaction gas
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 2
- 239000012495 reaction gas Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11928987U JPS6426374U (ko) | 1987-08-05 | 1987-08-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11928987U JPS6426374U (ko) | 1987-08-05 | 1987-08-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6426374U true JPS6426374U (ko) | 1989-02-14 |
Family
ID=31364386
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11928987U Pending JPS6426374U (ko) | 1987-08-05 | 1987-08-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6426374U (ko) |
-
1987
- 1987-08-05 JP JP11928987U patent/JPS6426374U/ja active Pending