JPS6425523A - Container of organic metal compound - Google Patents
Container of organic metal compoundInfo
- Publication number
- JPS6425523A JPS6425523A JP18256687A JP18256687A JPS6425523A JP S6425523 A JPS6425523 A JP S6425523A JP 18256687 A JP18256687 A JP 18256687A JP 18256687 A JP18256687 A JP 18256687A JP S6425523 A JPS6425523 A JP S6425523A
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- cylinder
- metal compound
- organic metal
- input side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To reduce the thickness and dispersion in composition, by connecting a pipe on the input side of an apparatus for containing an organic metal compound to the lowermost end of a cylinder part, and tightly connecting the pipe on the input side to the cylinder part or winding the pipe around the cylinder in a spiral pattern so as to form a unitary structure, thereby controlling group III raw material gas accurately. CONSTITUTION:A pipe 8 on the input side of an organic metal compound container is connected to the lowermost end of a cylinder 1 of a main body. The pipe 8 on the input side is tightly connected to the cylinder 1 or wound around the cylinder in a spiral pattern and welded. Since bubbling is performed in this state, organic metal compound 2 can be used without residue. Since the pipe 8 on the input side is tightly connected to the cylinder part 1 of the main body or wound around the cylinder and connected to the lowermost end 9, the pipe 8 on the input side is located in a constant temperature oven. Therefore, the temperature of the cylinder can be made equal to the temperature of hydrogen gas for bubbling. Thus the controllability of the vapor pressure of the organic metal compound 2 is improved. When the thin stainless steel pipe 8 having the thickness of 1/8 in. or less is used, a flow speed is improved, and reverse diffusion of the organic metal compound can be prevented.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18256687A JPS6425523A (en) | 1987-07-22 | 1987-07-22 | Container of organic metal compound |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18256687A JPS6425523A (en) | 1987-07-22 | 1987-07-22 | Container of organic metal compound |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6425523A true JPS6425523A (en) | 1989-01-27 |
Family
ID=16120517
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18256687A Pending JPS6425523A (en) | 1987-07-22 | 1987-07-22 | Container of organic metal compound |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6425523A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8170404B2 (en) | 2004-05-20 | 2012-05-01 | Akzo Nobel N.V. | Bubbler for constant vapor delivery of a solid chemical |
-
1987
- 1987-07-22 JP JP18256687A patent/JPS6425523A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8170404B2 (en) | 2004-05-20 | 2012-05-01 | Akzo Nobel N.V. | Bubbler for constant vapor delivery of a solid chemical |
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