JPS6425523A - Container of organic metal compound - Google Patents

Container of organic metal compound

Info

Publication number
JPS6425523A
JPS6425523A JP18256687A JP18256687A JPS6425523A JP S6425523 A JPS6425523 A JP S6425523A JP 18256687 A JP18256687 A JP 18256687A JP 18256687 A JP18256687 A JP 18256687A JP S6425523 A JPS6425523 A JP S6425523A
Authority
JP
Japan
Prior art keywords
pipe
cylinder
metal compound
organic metal
input side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18256687A
Other languages
Japanese (ja)
Inventor
Yasuhito Takahashi
Mototsugu Ogura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP18256687A priority Critical patent/JPS6425523A/en
Publication of JPS6425523A publication Critical patent/JPS6425523A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To reduce the thickness and dispersion in composition, by connecting a pipe on the input side of an apparatus for containing an organic metal compound to the lowermost end of a cylinder part, and tightly connecting the pipe on the input side to the cylinder part or winding the pipe around the cylinder in a spiral pattern so as to form a unitary structure, thereby controlling group III raw material gas accurately. CONSTITUTION:A pipe 8 on the input side of an organic metal compound container is connected to the lowermost end of a cylinder 1 of a main body. The pipe 8 on the input side is tightly connected to the cylinder 1 or wound around the cylinder in a spiral pattern and welded. Since bubbling is performed in this state, organic metal compound 2 can be used without residue. Since the pipe 8 on the input side is tightly connected to the cylinder part 1 of the main body or wound around the cylinder and connected to the lowermost end 9, the pipe 8 on the input side is located in a constant temperature oven. Therefore, the temperature of the cylinder can be made equal to the temperature of hydrogen gas for bubbling. Thus the controllability of the vapor pressure of the organic metal compound 2 is improved. When the thin stainless steel pipe 8 having the thickness of 1/8 in. or less is used, a flow speed is improved, and reverse diffusion of the organic metal compound can be prevented.
JP18256687A 1987-07-22 1987-07-22 Container of organic metal compound Pending JPS6425523A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18256687A JPS6425523A (en) 1987-07-22 1987-07-22 Container of organic metal compound

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18256687A JPS6425523A (en) 1987-07-22 1987-07-22 Container of organic metal compound

Publications (1)

Publication Number Publication Date
JPS6425523A true JPS6425523A (en) 1989-01-27

Family

ID=16120517

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18256687A Pending JPS6425523A (en) 1987-07-22 1987-07-22 Container of organic metal compound

Country Status (1)

Country Link
JP (1) JPS6425523A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8170404B2 (en) 2004-05-20 2012-05-01 Akzo Nobel N.V. Bubbler for constant vapor delivery of a solid chemical

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8170404B2 (en) 2004-05-20 2012-05-01 Akzo Nobel N.V. Bubbler for constant vapor delivery of a solid chemical

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