JPS6425418A - Method of monitoring plasma etching - Google Patents

Method of monitoring plasma etching

Info

Publication number
JPS6425418A
JPS6425418A JP18149387A JP18149387A JPS6425418A JP S6425418 A JPS6425418 A JP S6425418A JP 18149387 A JP18149387 A JP 18149387A JP 18149387 A JP18149387 A JP 18149387A JP S6425418 A JPS6425418 A JP S6425418A
Authority
JP
Japan
Prior art keywords
plasma
temperature
lights
wavelengths
density
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18149387A
Other languages
English (en)
Inventor
Yoshiro Fujita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP18149387A priority Critical patent/JPS6425418A/ja
Publication of JPS6425418A publication Critical patent/JPS6425418A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP18149387A 1987-07-21 1987-07-21 Method of monitoring plasma etching Pending JPS6425418A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18149387A JPS6425418A (en) 1987-07-21 1987-07-21 Method of monitoring plasma etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18149387A JPS6425418A (en) 1987-07-21 1987-07-21 Method of monitoring plasma etching

Publications (1)

Publication Number Publication Date
JPS6425418A true JPS6425418A (en) 1989-01-27

Family

ID=16101720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18149387A Pending JPS6425418A (en) 1987-07-21 1987-07-21 Method of monitoring plasma etching

Country Status (1)

Country Link
JP (1) JPS6425418A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5374327A (en) * 1992-04-28 1994-12-20 Tokyo Electron Limited Plasma processing method
US5775836A (en) * 1996-03-05 1998-07-07 Dean, Jr.; Americo Capping device for uniform capping of subaquatic sediments

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5374327A (en) * 1992-04-28 1994-12-20 Tokyo Electron Limited Plasma processing method
US5775836A (en) * 1996-03-05 1998-07-07 Dean, Jr.; Americo Capping device for uniform capping of subaquatic sediments

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