JPS6424320A - Superconductive thin film forming device - Google Patents
Superconductive thin film forming deviceInfo
- Publication number
- JPS6424320A JPS6424320A JP62181887A JP18188787A JPS6424320A JP S6424320 A JPS6424320 A JP S6424320A JP 62181887 A JP62181887 A JP 62181887A JP 18188787 A JP18188787 A JP 18188787A JP S6424320 A JPS6424320 A JP S6424320A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- vacuum tank
- vacuum
- gas
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To form a superconductive thin film with the desired composition ratio by monitoring the gas pressure in a vacuum tank, comparing the measured value of the pressure in the vacuum tank with the preset value of the pressure in the vacuum tank preset in advance, and controlling the pressure in the vacuum tank. CONSTITUTION:In addition to the control of the evaporating speed of a superconductive material, the pressure signal in a vacuum tank 11 monitored by a vacuum measuring piece 1 and a vacuum meter 2 is sent to a pressure adjuster 3, and the measured value of the pressure in the vacuum tank 11 when a film is formed is compared with the preset value of the pressure in the vacuum tank 11 inputted to the pressure adjuster 3 in advance as the optimum value. If there is a difference between the measured value and the preset value, a comparison signal is sent to a gas guiding means 4 such as a gas flow adjuster or a variable flow leak valve or an exhaust speed variable unit 8 adjusting the exhaust speed of a vacuum pump so that the measured value matches with the preset value. The gas guide quantity or the gas exhaust speed is adjusted, and the optimum pressure is obtained. A superconductive thin film with the desired composition ratio can be thereby formed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62181887A JP2584633B2 (en) | 1987-07-20 | 1987-07-20 | Superconducting thin film production equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62181887A JP2584633B2 (en) | 1987-07-20 | 1987-07-20 | Superconducting thin film production equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6424320A true JPS6424320A (en) | 1989-01-26 |
JP2584633B2 JP2584633B2 (en) | 1997-02-26 |
Family
ID=16108614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62181887A Expired - Lifetime JP2584633B2 (en) | 1987-07-20 | 1987-07-20 | Superconducting thin film production equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2584633B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110200450A1 (en) * | 2010-02-16 | 2011-08-18 | Edwards Limited | Apparatus and method for tuning pump speed |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5358487A (en) * | 1976-11-08 | 1978-05-26 | Hitachi Ltd | Decompressive gas phase reaction apparatus |
JPS5710323A (en) * | 1980-05-20 | 1982-01-19 | Schumacher Co J C | Chemical vapor distributing system |
-
1987
- 1987-07-20 JP JP62181887A patent/JP2584633B2/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5358487A (en) * | 1976-11-08 | 1978-05-26 | Hitachi Ltd | Decompressive gas phase reaction apparatus |
JPS5710323A (en) * | 1980-05-20 | 1982-01-19 | Schumacher Co J C | Chemical vapor distributing system |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110200450A1 (en) * | 2010-02-16 | 2011-08-18 | Edwards Limited | Apparatus and method for tuning pump speed |
US8657584B2 (en) * | 2010-02-16 | 2014-02-25 | Edwards Limited | Apparatus and method for tuning pump speed |
Also Published As
Publication number | Publication date |
---|---|
JP2584633B2 (en) | 1997-02-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5491625A (en) | Idle rotation controller for engine | |
JPS6424320A (en) | Superconductive thin film forming device | |
JPS5681230A (en) | Electronically controlled fuel injection device for internal combustion engine | |
JPS5459527A (en) | Air-fuel ratio controller for engine | |
JPS6484118A (en) | Control valve with flow rate indicator | |
JPS54137520A (en) | Exhaust gas recycling device | |
JPS61277030A (en) | Apparatus for calibrating vacuum gauge | |
JPS5382932A (en) | Variable venturi type carburetor | |
JPS55135641A (en) | Injection of cross-linking agent | |
JPS5618045A (en) | Fuel injection device | |
JPS555407A (en) | Air-fuel ratio controller for lpg engine | |
JPS57128840A (en) | Calibration device of gas partial pressure sensor | |
JPS54116523A (en) | Idling controller for carburetor | |
JPS5499884A (en) | Variafble sample period controller | |
JPS5663179A (en) | Flow controller | |
JPS56136155A (en) | Automatic replenishment device for hydrogen gas | |
JPS5325934A (en) | Combustion controller and control method | |
JPS6484558A (en) | Gas pressure controller for ion implantating device | |
JPS6490520A (en) | Method for growing semiconductor thin film | |
JPS55148931A (en) | Control method of air fuel ratio | |
JPS57120624A (en) | Method for controlling flow rate of cooling water | |
JPS5440924A (en) | Fuel control equipment for engine | |
JPS5225929A (en) | Injection carbureter | |
JPS5791341A (en) | Fuel supply equipment for engine | |
JPS53115412A (en) | Exhaust gas reflux controller |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20071121 Year of fee payment: 11 |