JPS6423867U - - Google Patents
Info
- Publication number
- JPS6423867U JPS6423867U JP11797787U JP11797787U JPS6423867U JP S6423867 U JPS6423867 U JP S6423867U JP 11797787 U JP11797787 U JP 11797787U JP 11797787 U JP11797787 U JP 11797787U JP S6423867 U JPS6423867 U JP S6423867U
- Authority
- JP
- Japan
- Prior art keywords
- compressed air
- plasma
- inductively coupled
- mass spectrometer
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- 239000007789 gas Substances 0.000 claims description 4
- 238000009616 inductively coupled plasma Methods 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims 2
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 230000001939 inductive effect Effects 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11797787U JPH0615392Y2 (ja) | 1987-07-31 | 1987-07-31 | 高周波誘導結合プラズマ質量分析計 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11797787U JPH0615392Y2 (ja) | 1987-07-31 | 1987-07-31 | 高周波誘導結合プラズマ質量分析計 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6423867U true JPS6423867U (cs) | 1989-02-08 |
| JPH0615392Y2 JPH0615392Y2 (ja) | 1994-04-20 |
Family
ID=31361922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11797787U Expired - Lifetime JPH0615392Y2 (ja) | 1987-07-31 | 1987-07-31 | 高周波誘導結合プラズマ質量分析計 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0615392Y2 (cs) |
-
1987
- 1987-07-31 JP JP11797787U patent/JPH0615392Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0615392Y2 (ja) | 1994-04-20 |
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