JPS6422028U - - Google Patents

Info

Publication number
JPS6422028U
JPS6422028U JP11682187U JP11682187U JPS6422028U JP S6422028 U JPS6422028 U JP S6422028U JP 11682187 U JP11682187 U JP 11682187U JP 11682187 U JP11682187 U JP 11682187U JP S6422028 U JPS6422028 U JP S6422028U
Authority
JP
Japan
Prior art keywords
heat treatment
treatment furnace
horizontal heat
reaction tube
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11682187U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11682187U priority Critical patent/JPS6422028U/ja
Publication of JPS6422028U publication Critical patent/JPS6422028U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第1図はこの考案の半導体横型熱処理炉の一実
施例を示す断面図、第2図は一実施例における反
応管を取出して示す斜視図、第3図は従来の半導
体横型熱処理炉を示す断面図である。 31……反応管、32……延長管、33……溝
、34……すり合わせ接続部分。

Claims (1)

  1. 【実用新案登録請求の範囲】 反応管に、嵌合すり合わせにより延長管が接続
    される半導体横型熱処理炉において、 反応管または延長管の嵌合すり合わせ面に螺旋
    状の溝を形成したことを特徴とする半導体横型熱
    処理炉。
JP11682187U 1987-07-31 1987-07-31 Pending JPS6422028U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11682187U JPS6422028U (ja) 1987-07-31 1987-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11682187U JPS6422028U (ja) 1987-07-31 1987-07-31

Publications (1)

Publication Number Publication Date
JPS6422028U true JPS6422028U (ja) 1989-02-03

Family

ID=31359711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11682187U Pending JPS6422028U (ja) 1987-07-31 1987-07-31

Country Status (1)

Country Link
JP (1) JPS6422028U (ja)

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