JPS642071U - - Google Patents
Info
- Publication number
- JPS642071U JPS642071U JP9509787U JP9509787U JPS642071U JP S642071 U JPS642071 U JP S642071U JP 9509787 U JP9509787 U JP 9509787U JP 9509787 U JP9509787 U JP 9509787U JP S642071 U JPS642071 U JP S642071U
- Authority
- JP
- Japan
- Prior art keywords
- silicon plate
- etching
- grid electrode
- forming
- sample chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000005284 excitation Effects 0.000 claims description 2
- 238000005530 etching Methods 0.000 claims 5
- 150000002500 ions Chemical class 0.000 claims 2
- 238000000605 extraction Methods 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9509787U JPS642071U (nl) | 1987-06-19 | 1987-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9509787U JPS642071U (nl) | 1987-06-19 | 1987-06-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS642071U true JPS642071U (nl) | 1989-01-09 |
Family
ID=30959241
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9509787U Pending JPS642071U (nl) | 1987-06-19 | 1987-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS642071U (nl) |
-
1987
- 1987-06-19 JP JP9509787U patent/JPS642071U/ja active Pending
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