JPS6420714A - Surface acoustic wave device - Google Patents

Surface acoustic wave device

Info

Publication number
JPS6420714A
JPS6420714A JP17786287A JP17786287A JPS6420714A JP S6420714 A JPS6420714 A JP S6420714A JP 17786287 A JP17786287 A JP 17786287A JP 17786287 A JP17786287 A JP 17786287A JP S6420714 A JPS6420714 A JP S6420714A
Authority
JP
Japan
Prior art keywords
thin film
base
diamond
acoustic wave
diamond thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17786287A
Other languages
Japanese (ja)
Inventor
Yukio Yoshino
Satoshi Sekimoto
Toru Kasatsugu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP17786287A priority Critical patent/JPS6420714A/en
Publication of JPS6420714A publication Critical patent/JPS6420714A/en
Pending legal-status Critical Current

Links

Landscapes

  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To attain high frequency while increasing the sound velocity by forming a diamond thin film to one side of a base. CONSTITUTION:A base 1 is made of a comparatively inexpensive material such as glass, alumina and the diamond thin film 2 is formed on one face of the base 1. The thin film forming technology such as sputtering, vacuum vapor deposition, ion plating, CVD, or ICD is applied to form the diamond thin film 2. An interdigital transducer IDT 3 is formed on the diamond thin film 2 and a piezoelectric thin film 4 is formed to cover the IDT 3. Thus, the diamond is used for the propagation path of the surface acoustic wave in this way, high frequency application of nearly 2.4 times is attained.
JP17786287A 1987-07-16 1987-07-16 Surface acoustic wave device Pending JPS6420714A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17786287A JPS6420714A (en) 1987-07-16 1987-07-16 Surface acoustic wave device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17786287A JPS6420714A (en) 1987-07-16 1987-07-16 Surface acoustic wave device

Publications (1)

Publication Number Publication Date
JPS6420714A true JPS6420714A (en) 1989-01-24

Family

ID=16038375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17786287A Pending JPS6420714A (en) 1987-07-16 1987-07-16 Surface acoustic wave device

Country Status (1)

Country Link
JP (1) JPS6420714A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6462911A (en) * 1987-09-03 1989-03-09 Sumitomo Electric Industries Surface acoustic wave element
WO1989008949A1 (en) * 1988-03-17 1989-09-21 Fujitsu Limited Surface acoustic wave device
US5079225A (en) * 1990-03-12 1992-01-07 Aleksey Holloway Process and apparatus for preparing textured crystalline materials using anisotropy in the paramagnetic susceptibility
US5221870A (en) * 1991-09-30 1993-06-22 Sumitomo Electric Industries, Ltd. Surface acoustic wave device
US5294858A (en) * 1992-02-21 1994-03-15 Sumitomo Electric Industries, Ltd. Surface acoustic wave device
US5320865A (en) * 1991-09-24 1994-06-14 Sumitomo Electric Industries, Ltd. Method of manufacturing a surface acoustic wave device
US5329208A (en) * 1991-06-05 1994-07-12 Sumitomo Electric Industries, Ltd. Surface acoustic wave device and method for producing the same
US5426340A (en) * 1993-01-29 1995-06-20 Sumitomo Electric Industries, Ltd. Surface acoustic wave device and method of manufacturing the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5631213A (en) * 1979-08-24 1981-03-30 Matsushita Electric Ind Co Ltd Surface elastic wave element

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5631213A (en) * 1979-08-24 1981-03-30 Matsushita Electric Ind Co Ltd Surface elastic wave element

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6462911A (en) * 1987-09-03 1989-03-09 Sumitomo Electric Industries Surface acoustic wave element
WO1989008949A1 (en) * 1988-03-17 1989-09-21 Fujitsu Limited Surface acoustic wave device
US5079225A (en) * 1990-03-12 1992-01-07 Aleksey Holloway Process and apparatus for preparing textured crystalline materials using anisotropy in the paramagnetic susceptibility
US5329208A (en) * 1991-06-05 1994-07-12 Sumitomo Electric Industries, Ltd. Surface acoustic wave device and method for producing the same
US5355568A (en) * 1991-06-05 1994-10-18 Sumitomo Electric Industries, Ltd. Method of making a surface acoustic wave device
US5320865A (en) * 1991-09-24 1994-06-14 Sumitomo Electric Industries, Ltd. Method of manufacturing a surface acoustic wave device
US5221870A (en) * 1991-09-30 1993-06-22 Sumitomo Electric Industries, Ltd. Surface acoustic wave device
US5294858A (en) * 1992-02-21 1994-03-15 Sumitomo Electric Industries, Ltd. Surface acoustic wave device
US5426340A (en) * 1993-01-29 1995-06-20 Sumitomo Electric Industries, Ltd. Surface acoustic wave device and method of manufacturing the same

Similar Documents

Publication Publication Date Title
DE3571887D1 (en) Porous matching layer in an ultrasonic applicator
EP0392879A3 (en) Surface acoustic wave device
AU548536B2 (en) Transducer plate for piezoelectric electro-acoustic transducers
JPS6462911A (en) Surface acoustic wave element
JPS6420714A (en) Surface acoustic wave device
CA1035458A (en) Acoustic delay surface wave motion transducer systems with enhanced stability
EP0219182A3 (en) Staggered saw resonator differential detection
GB843827A (en) Piezo-electric transducer and process for making the same
AU576417B2 (en) Saw devices with reflection-suppressing fingers
ES8702093A1 (en) Electrical surface wave filter.
EP0123455A3 (en) Acoustic receiver transducer
JPS5232650A (en) Surface elastic wave element
JPS5713802A (en) Elastic surface wave oscillator
AU585317B2 (en) Saw devices including resistive films
JPS55130219A (en) Surface elastic wave filter
JPS57191521A (en) Ultrasonic probe
GB1363519A (en) Acoustic surface wave device
JPS579120A (en) Piezoelectric device
JPS5768925A (en) Piezoelectric device
JPS55151810A (en) Elastic surface wave filter
JPS54111256A (en) Elastic surface wave element
JPS57155825A (en) Surface wave device
JPS5713807A (en) Elastic surface wave device
JPS5466792A (en) Surface acoustic wave element
JPS57201315A (en) Acoustic element