JPS6420671A - Contact force sensor - Google Patents
Contact force sensorInfo
- Publication number
- JPS6420671A JPS6420671A JP17591187A JP17591187A JPS6420671A JP S6420671 A JPS6420671 A JP S6420671A JP 17591187 A JP17591187 A JP 17591187A JP 17591187 A JP17591187 A JP 17591187A JP S6420671 A JPS6420671 A JP S6420671A
- Authority
- JP
- Japan
- Prior art keywords
- supporting
- force sensor
- contact force
- silicon
- cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
- Pressure Sensors (AREA)
Abstract
PURPOSE:To form a thin and small size contact force sensor having an improved detection sensitivity, accuracy and response characteristics by forming a bridge circuit with semiconductor strain gages to a contact force sensor of silicon, providing a switching means thereto, providing a solder dump to each terminal and supporting both ends of a cell with a supporting part of supporting frame. CONSTITUTION:A bridge circuit is formed by strain gages R1-R4 to a silicon cell 1 of contact force sensor, a voltage V is applied to this circuit, and an output voltage is output through switches Sw1, Sw2 with a change of electrical resistance of gates R1-R4. A printed wiring board 4 is bonded to this silicon cell 1 with a bump 2, both ends of silicon cell 1 are supported by a supporting part 3A of supporting board 3, thereby a thin body 5 to apply a load to the other surface of silicon cell 1 is formed. A plurality of silicon cells 1 described above are supported by the supporting part 33A of windows 7 formed like a lattice of the supporting frame 6. The entire part is formed thinner and small size in order to improve various characteristics of detection sensitivity.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17591187A JPH0736445B2 (en) | 1987-07-16 | 1987-07-16 | Pressure sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17591187A JPH0736445B2 (en) | 1987-07-16 | 1987-07-16 | Pressure sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6420671A true JPS6420671A (en) | 1989-01-24 |
JPH0736445B2 JPH0736445B2 (en) | 1995-04-19 |
Family
ID=16004396
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17591187A Expired - Lifetime JPH0736445B2 (en) | 1987-07-16 | 1987-07-16 | Pressure sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0736445B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106500887A (en) * | 2016-10-18 | 2017-03-15 | 汕头超声显示器技术有限公司 | A kind of strain-type mechanics induction installation for reducing cabling |
-
1987
- 1987-07-16 JP JP17591187A patent/JPH0736445B2/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106500887A (en) * | 2016-10-18 | 2017-03-15 | 汕头超声显示器技术有限公司 | A kind of strain-type mechanics induction installation for reducing cabling |
Also Published As
Publication number | Publication date |
---|---|
JPH0736445B2 (en) | 1995-04-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR890702161A (en) | Integrated circuit device and manufacturing method thereof | |
ATE47505T1 (en) | MONOLITHIC INTEGRATED SEMICONDUCTOR CIRCUIT. | |
EP0346061A3 (en) | Integrated circuit device having an improved package structure | |
EP0311690A4 (en) | Integrated solar battery and method of producing the same. | |
JPS57100770A (en) | Switching element | |
JPS6420671A (en) | Contact force sensor | |
EP0282012A3 (en) | Superconducting semiconductor device | |
DE3376874D1 (en) | Integrated circuit sensor for force or displacement | |
JPS568854A (en) | Package for semiconductor device | |
JPS63128236A (en) | Pressing force sensor | |
DE59610200D1 (en) | Arrangement for indicating the occurrence of moisture | |
JPS5661679A (en) | Indicating device | |
JPS6488255A (en) | Detecting device of acceleration | |
JPH0564863B2 (en) | ||
JPS646831A (en) | Sensor | |
JPS6472022A (en) | Pressure sensor | |
JPH0450521Y2 (en) | ||
JPS55117253A (en) | Electronic device | |
JPS54153586A (en) | Semiconductor device | |
JPS6225433A (en) | Semiconductor element characteristic measuring device | |
JPH0660856B2 (en) | Pressure sensor | |
JPS6490573A (en) | Superconducting element | |
JPS6439504A (en) | Electrostatic capacity type displacement detection sensor | |
JPS6473765A (en) | Solid state image sensing device | |
JPS6450456A (en) | Semiconductor integrated circuit device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |