JPS6420671A - Contact force sensor - Google Patents

Contact force sensor

Info

Publication number
JPS6420671A
JPS6420671A JP17591187A JP17591187A JPS6420671A JP S6420671 A JPS6420671 A JP S6420671A JP 17591187 A JP17591187 A JP 17591187A JP 17591187 A JP17591187 A JP 17591187A JP S6420671 A JPS6420671 A JP S6420671A
Authority
JP
Japan
Prior art keywords
supporting
force sensor
contact force
silicon
cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17591187A
Other languages
Japanese (ja)
Other versions
JPH0736445B2 (en
Inventor
Tsuneki Shinokura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP17591187A priority Critical patent/JPH0736445B2/en
Publication of JPS6420671A publication Critical patent/JPS6420671A/en
Publication of JPH0736445B2 publication Critical patent/JPH0736445B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE:To form a thin and small size contact force sensor having an improved detection sensitivity, accuracy and response characteristics by forming a bridge circuit with semiconductor strain gages to a contact force sensor of silicon, providing a switching means thereto, providing a solder dump to each terminal and supporting both ends of a cell with a supporting part of supporting frame. CONSTITUTION:A bridge circuit is formed by strain gages R1-R4 to a silicon cell 1 of contact force sensor, a voltage V is applied to this circuit, and an output voltage is output through switches Sw1, Sw2 with a change of electrical resistance of gates R1-R4. A printed wiring board 4 is bonded to this silicon cell 1 with a bump 2, both ends of silicon cell 1 are supported by a supporting part 3A of supporting board 3, thereby a thin body 5 to apply a load to the other surface of silicon cell 1 is formed. A plurality of silicon cells 1 described above are supported by the supporting part 33A of windows 7 formed like a lattice of the supporting frame 6. The entire part is formed thinner and small size in order to improve various characteristics of detection sensitivity.
JP17591187A 1987-07-16 1987-07-16 Pressure sensor Expired - Lifetime JPH0736445B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17591187A JPH0736445B2 (en) 1987-07-16 1987-07-16 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17591187A JPH0736445B2 (en) 1987-07-16 1987-07-16 Pressure sensor

Publications (2)

Publication Number Publication Date
JPS6420671A true JPS6420671A (en) 1989-01-24
JPH0736445B2 JPH0736445B2 (en) 1995-04-19

Family

ID=16004396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17591187A Expired - Lifetime JPH0736445B2 (en) 1987-07-16 1987-07-16 Pressure sensor

Country Status (1)

Country Link
JP (1) JPH0736445B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106500887A (en) * 2016-10-18 2017-03-15 汕头超声显示器技术有限公司 A kind of strain-type mechanics induction installation for reducing cabling

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106500887A (en) * 2016-10-18 2017-03-15 汕头超声显示器技术有限公司 A kind of strain-type mechanics induction installation for reducing cabling

Also Published As

Publication number Publication date
JPH0736445B2 (en) 1995-04-19

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term