JPS6439504A - Electrostatic capacity type displacement detection sensor - Google Patents

Abstract

PURPOSE:To reduce the attenuation of a signal and to perform stable detection for a long time even when an electrostatic capacity type detection sensor is used in adverse environment by sticking noble metal such as gold on the terminal part of an electrode formed of metal such as tantalum. CONSTITUTION:A transmitting electrode 3 and a receiving electrode 4 including a pattern wiring part 7 are formed on the fixed plate 1 of the electrostatic capacity type displacement detection sensor and a coupling electrode 5 and an earth electrode 6 are formed on a movable plate 2. When AC voltages are applied to the respective electrodes 3, a voltage signal is induced at the electrode 4 through the electrode 5. Therefore, if the movable plate 2 fixed on a spindle is displacement relatively to the fixed plate 1, a signal corresponding to the quantity of movement of the spindle is outputted from the electrode 4. Here, the electrodes 3, 4, and 5 are formed of tantalum, and then a film 31 of gold is laminated on the top surface of the terminal 7A of the wiring part 7 and connected to the terminal of flexible wiring 8, so that the tantalum oxide never spoils the conductivity at the wiring connection part and the stable detection is performed with small signal attenuation.