JPS6420618A - Device for editing mask pattern input - Google Patents
Device for editing mask pattern inputInfo
- Publication number
- JPS6420618A JPS6420618A JP62176186A JP17618687A JPS6420618A JP S6420618 A JPS6420618 A JP S6420618A JP 62176186 A JP62176186 A JP 62176186A JP 17618687 A JP17618687 A JP 17618687A JP S6420618 A JPS6420618 A JP S6420618A
- Authority
- JP
- Japan
- Prior art keywords
- mask pattern
- input
- editor
- pattern
- energy distribution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To efficiently obtain a corrected mask pattern by composing a mask pattern input editor of electron beam exposing mask pattern input editing means used for manufacturing a VLSI, calculating means for energy distribution of electrons irradiated through the pattern, lost in a resist, and display means therefor. CONSTITUTION:A mask pattern input editor 1 inputs new input of position information of a mask pattern, new position information for input mask pattern, corrects and stores position information of the mask pattern information. An energy distribution calculator 2 calculates energy distribution stored in a resist from the trace of incident electrons by a Monte-Carlo method on the basis of mask information input and edited in the editor 1. A display unit 3 simultaneously displays the pattern edited by the editor 1 and the calculated result obtained by the calculator 2. Thus, a proximity effect in the fine mask pattern is suitably corrected while predicting it in advance.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62176186A JPS6420618A (en) | 1987-07-15 | 1987-07-15 | Device for editing mask pattern input |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62176186A JPS6420618A (en) | 1987-07-15 | 1987-07-15 | Device for editing mask pattern input |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6420618A true JPS6420618A (en) | 1989-01-24 |
Family
ID=16009153
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62176186A Pending JPS6420618A (en) | 1987-07-15 | 1987-07-15 | Device for editing mask pattern input |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6420618A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03175614A (en) * | 1989-12-04 | 1991-07-30 | Fujitsu Ltd | Data processing method and data controlling method for automatic lsi designing system |
JP2006343587A (en) * | 2005-06-09 | 2006-12-21 | Toshiba Corp | Method for creating evaluation pattern, and program |
-
1987
- 1987-07-15 JP JP62176186A patent/JPS6420618A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03175614A (en) * | 1989-12-04 | 1991-07-30 | Fujitsu Ltd | Data processing method and data controlling method for automatic lsi designing system |
JP2006343587A (en) * | 2005-06-09 | 2006-12-21 | Toshiba Corp | Method for creating evaluation pattern, and program |
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