JPS6419668A - Ion implanter - Google Patents

Ion implanter

Info

Publication number
JPS6419668A
JPS6419668A JP62173897A JP17389787A JPS6419668A JP S6419668 A JPS6419668 A JP S6419668A JP 62173897 A JP62173897 A JP 62173897A JP 17389787 A JP17389787 A JP 17389787A JP S6419668 A JPS6419668 A JP S6419668A
Authority
JP
Japan
Prior art keywords
work
transfer device
held
work holder
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62173897A
Other languages
English (en)
Japanese (ja)
Other versions
JPH053107B2 (cg-RX-API-DMAC10.html
Inventor
Taizo Hoshino
Aiji Shirou
Yukio Nakamori
Yuzo Sakurada
Motoyoshi Furusawa
Kazuhiro Kashimoto
Takenobu Fuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Ulvac Inc
Original Assignee
Nippon Steel Corp
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp, Ulvac Inc filed Critical Nippon Steel Corp
Priority to JP62173897A priority Critical patent/JPS6419668A/ja
Publication of JPS6419668A publication Critical patent/JPS6419668A/ja
Publication of JPH053107B2 publication Critical patent/JPH053107B2/ja
Granted legal-status Critical Current

Links

JP62173897A 1987-07-14 1987-07-14 Ion implanter Granted JPS6419668A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62173897A JPS6419668A (en) 1987-07-14 1987-07-14 Ion implanter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62173897A JPS6419668A (en) 1987-07-14 1987-07-14 Ion implanter

Publications (2)

Publication Number Publication Date
JPS6419668A true JPS6419668A (en) 1989-01-23
JPH053107B2 JPH053107B2 (cg-RX-API-DMAC10.html) 1993-01-14

Family

ID=15969114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62173897A Granted JPS6419668A (en) 1987-07-14 1987-07-14 Ion implanter

Country Status (1)

Country Link
JP (1) JPS6419668A (cg-RX-API-DMAC10.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5795396A (en) * 1989-03-31 1998-08-18 Canon Kabushiki Kaisha Apparatus for forming crystalline film
JP2016031928A (ja) * 2014-07-29 2016-03-07 ライカ ミクロジュステーメ ゲーエムベーハー クライオ顕微鏡法のための操作容器

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1016863A4 (en) * 1997-09-19 2001-10-17 Japan Science & Tech Corp HIGH VACUUM XAFS MEASURING INSTRUMENT

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5795396A (en) * 1989-03-31 1998-08-18 Canon Kabushiki Kaisha Apparatus for forming crystalline film
JP2016031928A (ja) * 2014-07-29 2016-03-07 ライカ ミクロジュステーメ ゲーエムベーハー クライオ顕微鏡法のための操作容器

Also Published As

Publication number Publication date
JPH053107B2 (cg-RX-API-DMAC10.html) 1993-01-14

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